Boc Edwards HTU-108 Series

Eight Channel Model Tested HTU-108 $2,400 HTU-108D $3,900

The BOC Edwards HTU-108 series is a recirculating water cooler designed to meet or exceed the specific cooling requirements for Applied Materials ENDURA process tools, e.g. CL and SL tools.

The cooling capacity is 100 kW. Other specifications for the heat exchanger are:

• Ambient temperature range: 10°C to 40°C (50°F to 104°F)
• Maximum ambient relative humidity: 80%, up to 31°C (88°F)
• Derate linearly to 50% at 40°C (104°F)
• Required main power overcurrent protection: 15 Amps
• Required main power earth leakage protection: trip at 30 mA
• (AIC) rating, pad lockable in OFF position
• Electrical supply voltage (nominal): 200/208 VAC
• Electrical supply voltage (min/max): 177/228 VAC
• Electrical supply frequency: 50/60 Hz
• Electrical supply, number of phases: 3
• Supply water temperature range: 15°C to 22°C (59°F to 72°F)
• Supply water pressure range: 3.45 to 5.5 bar (50 to 80 psi)
• Supply water flow range: 30 to 76 lpm (8 to 20 gpm)

• 108 dimensions: 610mm x 686mm x 1016mm
• Total weight (dry): 182kg (400 lbs.)
• Total weight (wet): 288kg (633 lbs.)
• Maximum reservoir capacity: 105.8 Liters (28 U.S. gallons)
• Maximum available reservoir capacity: 79.4 Liters (21 U.S. gallons)
• Reservoir water volume at warning level: 26.5 Liters (7 U.S. gallons)
• Reservoir water volume at fault level: 13.2 Liters (3.5 U.S. gallons)
• Maximum tilt angle (DRY): 15°
• Water fittings: NPT

Digital Manuals

• HTU-108