Prometrix OmniMap RS35c

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The OmniMap RS35c collects and analyzes sheet resistance data on various conductive layers such as implants, diffusions, epi, CVD, metals and bulk substrates. Provides accurate and repeatable sheet resistance measurements from 5m ohms/sq to 5m ohms/sq on 2 in. (50mm) to 8 in. (200mm) wafers by uniting sophisticated modeling algorithms, advanced analysis techniques and precision electronics. Measures up to 1264 sites per wafer using standard or user-defined patterns, and displays test results in the form of contourmaps, 3-D maps, diameter scans and die maps.

Sheet Resistance

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