MKS ASTeX ASTRONex Reactive Gas Generator

Ask The MKS ASTeX ASTRONex reactive gas generator is a reactive source for chamber cleaning and other reactive gas applications. The ASTRON ex uses low field toroidal plasma to dissociate input gas to produce downstream reactive chemistries. It effectively dissociates alternative gases such as C₃F₈ and CF₄ as an atomic florine generator.

$7,200. ASTeX Astron Fl20620 generator. 400 kHz output, 208 3φ input, 38 lbs.

ASTRONex

• Gas Supply: 100% Ar required for ignition only
• Operating Pressure: 1 to 4 Torr during ignition measured at ASTRON outlet
• 1 to 10 Torr post ignition measured at ASTRON outlet once flow is stabilized
• Reactant Output: >98% dissociation up to 6 slm NF₃
• Wetted Materials: 6061-T6 Aluminum hardcoat anodized
• 6061-T6 Aluminum, Chemraz, Alumina: Control Interface
• 9 and 25pin D connectors, opto-isolated I/O
• Inputs: On/Off
• Outputs: Ready, AC line, Plasma On, Utilities
• Power 187 to 228 VAC, 50/60 Hz, 60A, 3 phase
• Cooling water 2.0 gpm, <30^oC
• Ambient 40^oC max
• Compliance, S2-0200,CE, NRTL, F47

Dimensions