Brooks Automation GX-5000

GX-5000

Ask for current price. The Brooks GX-5000 is a vacuum cluster tool integration platform for 200mm to 300mm wafers, with the capability for two load locks and three process facets. It handles wafers without mechanical changes, and is ideally suited for PVD or CVD and large process module footprints.

GX-5000 GX-5000
GX-5000
Model #: 002-5870-07
Serial #: 0003-10401
GX-5000
Model #: 002-7090-04
Serial #: 0003-10336
GX-5000
Model #: 003-9010-03
Serial #: 0004-10077
GX-5000 GX-5000


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