Brooks Automation GX5000 & FX3000
Gemini Express 5000 (GX5000)
Sold. The Brooks Gemini Express 5000 (GX5000) is a vacuum cluster tool integration platform for 200mm to 300mm wafers, with the capability for two load locks and three process facets. The GX5000 handles wafers without mechanical changes, and is ideally suited for PVD or CVD and large process module footprints. We have two GX5000s in stock.
Installed on the GX5000s:
- Brooks MagnaTran 7 robot has been removed
- Oerlikon Leybold MAG W 1300 turbo pump
- Edwards IPX 180A dry pump
FabExpress (FX3000)
Ask for current price. The Brooks FabExpress (FX3000) is a atmospheric bridge system designed to simultaneously handle 200mm and 300mm wafers. The FX3000 is optimized with the Brooks Reliance robotics automation component set (robot and aligner) and the Brooks family of Load Port Modules qualified by 300mm fabs. We have two FX3000s in stock.
Installed on the FX3000s:
- Brooks Reliance robot, part #: 121655, serial #: 0607-10425
- Brooks robot aligner, part #: 002-7391-08, serial #: 0607-11186
- Brooks Reliance robot 2, model #: 017-0266-01, config. #: 017-0950-01, build code: 01080101
- Brooks robot aligner 2, part #: 002-7391-08, serial #: 0311-10187
Reliance robot aligner
Part #: 002-7391-08
Serial #: 0205-10404