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Used Brooks, Genmark, Kensington, Yaskawa Robots

Manufacturer Model Price Brooks FX3000 $8,000 Brooks GX5000 sold Brooks MagnaTran 7 sold Brooks MagnaTran 8 $15,000 Brooks Reliance $5,000 Brooks SLR 200 X-rot30M/R $5,000 Genmark Gencobot 4P link Genmark Gencobot 7S link Kensington 25-3700-1425-05 link

Brooks Automation Robots & Controllers

MagnaTran 7

Part # Surplus Serial # Price 003-1600-32 9912-10017 sold 003-1600-96 0605-11231 sold       Part # Installed Serial # Price 003-1600-32 0607-12175 sold

The Brooks Automation MagnaTran 7 wafer transfer robot is designed for production environments requiring minimum vibration, particle contamination and high throughput.

MagnaTran 8

Part # Serial # Price 0190-25011 300733-070211171 $15,000 0190-25011 300733-071112190 sold

Reliance

Part # Surplus Serial # Price 017-0950-01 0206-10028 $5,000 017-0950-01 0207-10452 $5,000       Part # Installed Serial # Price 121655 0607-10425 $5,000 017-0266-01 017-0950-01 $5,000

SLR 200 X-rot30M/R

$5,000. The SLR 200 series robot allows for manual loading and unloading of 8-inch standard SMIF pods containing a wafer or reticle cassette.

Brooks Robot Arms

Part # Serial # Price 127293 0605-10430 $850

Brooks Robot Remotes / Teach Pendants

Part # Serial # Price JZMQZ-TB40 G36270-8-5-19 $850 TT1ENR2-1 HH146210 $850 TT1ENR2-1 HH165728 $850 TT1ENR2-1-TVS-ES-BROOKS4 HH186243 $850 TT1ENR2-1-TVS-ES-BROOKS4 HH187905 $850 TT1ENR2-1-TVS-ES-BROOKS8 HH315200 $850

Brooks FIXLOAD Wafer Load Ports

Model # Serial # Price FIXLOAD 6 0406-10183 sold FIXLOAD 25 007902 $2,000 FIXLOAD 25 116201 $2,000 FIXLOAD 25 025101 $2,000 FIXLOAD 25 157802 $2,000 FIXLOAD 25 256601 $2,000 FIXLOAD 25 241301 $2,000 FIXLOAD 25 125901 $2,000

FIXLOAD Features:

• Most accurate and fastest wafer access (6 sec.)
• BOLTS interface
• HyBridge OC200 (FIXLOAD 25)
• Fully SEMI compliant + CE certified
• Follows I300I guidelines
• Choice of electronic solution (Basic I/O, CPU Control, Device Net)
• E84 Parallel I/O
• Parallel interlocking
• Single connector interface communication for: E84, Carrier ID and FixMAP
• Kinematic couplings for proper placement

Optional Features:

• 13- or 25-wafer capacity
• Integration of Carrier ID Reader/Writer (IR, RF, Barcode)
• Safety frame
• FEOL/BEOL lock out pin
• Carriage

Benefits:

• Highest cleanliness (CC 0.01 acc. to Fed. Stand. 209E)
• Field proven reliability
• Prepared for customized configurations
• Easy and seamless integration with process tool
• Small footprint
• Easiest maintenance access
• Ergonomic loading height

Brooks Wafer Load Ports ERGO/FOUP

Crated

Model # Serial # Price 002-7200-00 10226 $2,500 002-7200-20 10068 $2,500 002-7200-20 10282 $2,500 002-7200-20 10337 $2,500 002-7200-21 0305-10338 $2,500 002-7200-21 10530 $2,500 002-8700-01 10562 $2,500

Uncrated

Model # Serial # Price 002-7200-21 dmg 0607-10787 $1,500 002-7200-21 dmg 0607-10789 $1,500 002-7200-21 0104-10137 $1,500 002-7200-21 0311-10284 $1,500 002-8700-01 0306-10573 $1,500 002-8700-01 0306-10574 $1,500 002-8700-01 0307-10155 $1,500 002-8700-01 0309-10622 $1,500 002-8700-01 0404-11557 $1,500 002-8700-01 0406-10563 $1,500 002-8700-01 0406-10564 $1,500

Brooks Vacuum Cassette Elevators VCE6

Model # Serial # Price 003-9010-03 0106-10764 sold

ASYST Wafer Load Ports

Model # Part # Serial # Price SMIF-300FL, S3,25WFR 9750-2000-00 01-1003-06127 ask 300FL, S2.1 25WFR 9700-5158-03 01-4102-05173 ask FA300FL S2 1.25W/HAMA 9700-5970-01 4900-01609 $1,300 IsoPort 9700-9129-01 09-2305-401725 sold VersaPort 2200 Shuttle 9700-5384-02R 2001-B01639 $3,800 LPT Forward PPLT, RT 9700-5479-01 09-0804-20139 sold

ASYST Technologies was acquired by Crossing Automation in August 2009.

Brooks Series 8 Controllers

Part # Serial # Price 105946 0603-10395 $2,500 107995 0801-11486 $2,500 108199 0312-11178 $2,500 108199 0411-10553 $2,500

Part # Serial # Price 147195 0707-10922 $2,500 147299 0803-11212 $2,500 147299 0803-11215 $2,500 153434 0712-10809 $2,500

Brooks Universal DC Power Distribution

Model # Serial # Price 002-3987-02 9812-10062 ask 002-3987-02 S615001007 ask 002-3987-02 S650032243 ask

Part #: 001-4130-03
Serial #: 9801-3371

Shinko Robot & Controller

We have this Shinko BX80 for TEL Tokyo Electron.
Part #: BX80-070281-11
Type: SBX92100274
Model #: M015021001


Type: LM-ARM-CONT (CE-I)
Model #: H020211001

Smart Machines Robots & Controllers

We have two Smartbots in stock.
Serial #'s: 131, 132
Build Codes: 98090101, 98092201
Top Level #: 1-0116


Smart Machines Brooks-PRI Controller
Model #: SVR-C2
Part #: 900-001753

Yaskawa Robot & Controller

Model #: XU-RC400M-A00
Serial #: S4M619-11-01


NXC100
Type: ERCR-NS01-B004
Serial #: S65V94-2-02


Model #: RC/ELC1
Serial #: G68561-1-1-8, DDMQF-SR2232IR


Type: XU-ACT152L-C10
Serial #: S65U33-2-04

• SEMISTAR-M TL1515 (For 4 FOUPs)
• Traverse axis for high-speed transfers with AC linear motor
• Range of motion: 1,515 mm
• Maximum speed: 1,500 mm/s
• Positioning control accuracy: 0.1 (P-P) mm
• Payload: 45 kg
• Shipping weight: 465 lbs

The Yaskawa AC linear motor drives the traverse axis for high-speed transfers with minimal particles, vibration, and noise.

Kensington Robots

Model # Serial # Price 25-3700-1425-05 01-285-04A $2,800 25-3700-1425-05 01-285-04B $2,800

Kensington Robot & Controller Packages

Model #'s Serial #'s Price 25-3700-1725-50, 4000C-7 01-286-05, 02-220-04 $6,400 25-3700-1725-50, 4000C-7 01-286-12 $6,400 35-3700-1725-50, 4000C-7 02-220-10, 02-220-09 $6,400

Additional Kensington Controllers

Model # Serial # Price 4000 00-401-03 $1,000 4000C-7 01-286-07 $1,000 4000C-7 02-751-01 $1,000 4000C-7 02-751-03 $1,000 4000D5 01-285-04A $1,000 4000D5 01-285-04B $1,000

Kensington FI Tracks

Model # Serial # Price 25-3780-6050-00 01-286-07 $4,300 25-3780-6050-00 01-286-12 $4,300 35-3780-6050-20 02-220-09 $4,300

RORZE Robots & Controllers

Model # Serial # Price RR701L150-Z20-011 RE00382 sold RR713L1521-3A3-E11-0 RB00010 ask RR717L1521-3A6-211-1 RG00236 sold

Model #: CURR-4326-1
Serial #: UF00241

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Equipe Technologies

Model # Price ATM-1246 sold ATM-4191 sold ATM-4729 sold

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Misc. Robots & Controllers

Dynamic Automated Systems (DAS)
Model #: ROB 300 Series
Serial #: 2601001W




RP Automation 260 Robot


Copley Controls
Model #: 5424AC
Serial #: 14058889


Adept 315 Robot Controllers


Galil DMC-2110 & DMC-2120 Motion Controllers