Used Balzers BAK 1350 C

$350k on consignment. Balzers BAK 1350 C vacuum chamber is made of stainless steel with inside dimensions of approximately a 52 inch cube. A cryopump assures an oil free vacuum and high pumping speed for water. The base plate and top plate have feedthrough holes. Exterior half pipes allow water cooling or heating. The system has been stored under vacuum.

This high vacuum thin film process system can be configured for various types of evaporation. It was manufactured in 1997. The electrical is 3φ 460V.

Vacuum System

Box coater:

• Nonmagnetic stainless steel vacuum chamber and framework
• PVA 630 high vacuum valve without throttle position
• Free standing water and compressed air manifolds
• Grid type protection shields for the chamber
• Baseplate protection shield

Pump station:

• RCP 631-Z cryo pump
• QDP 80 dry pump
• QDB 500 roots blower
• Soft roughing device and vacuum valves
• 4 vacuum control gauges (3 Pirani, 1 Ion)
• ST 431 power supply

Features:

• Meissner cold trap in chamber
• PVA 630 P3 with cold trap
• Polycold PFC 1100
• Spare grid protection system for the chamber
• Rolls of heat treated aluminum foil (0.1mm x 0.9m x 45m)
• Spare protection shields for the baseplate
• Chevron water cooled
• Additional venting device (soft vent)
• Rotary drive with control board and assembling parts
• Gear driven planetary drive for flat substrates
• Substrate holders
• 18 kW Quartz radiant heater
• 2 600cc resistance evaporation sources
• 1 100cc resistance evaporation source

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