Denton Vacuum System Integrity I-26

The Integrity is Denton Vacuum's flagship system to produce optical coatings.

• 26" wide, 38" high, 30" deep chamber (13" radius)
• Telemark four pocket e-beam gun
• Telemark ST-6E high voltage power supply and controller
• Inficon XTC/2 deposition controller
• MKS 250 controller
• Tripp Lite AC voltage regulator
• CTI-Cryogenics Cryo-Torr 10 high vacuum pump
• Compaq P3 computer & GE Fanuc 90-30 PLC

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