Used Innotec VSC 24C

Batch Vertical Sputter System

System

This Innotec VS 24C is a batch type sputtering system. The cryopump is side mounted with a high conductance gate valve. The fixturing is a 24" flat plate planetary with rf bias etch capability. Each of the six planets is 7 1/2" driven at 9x hub speed, RF rated to 1kW. There is currently one water cooled cathode; the other two holes are blanked off.

Chamber

304 stainless steel, 24" diameter by 12" high cylindrical chamber

The chamber sides are faceted to allow easy addition of feedthroughs. A 4" view port is installed in the front. The system bottom plate is easily removable, Viton 0-ring sealed and is entirely useable for mounting sources or tooling. The top plate is Viton O-ring sealed and is supported by a hydraulic hoist for ample vertical travel.

The top plate is open for sources or tooling except for the few square inches required for hoist attachment. The chamber is supported by a welded steel tube frame at a height that allows ease of operation and service. The cryopump stack and all valving is enclosed but readily accessible for maintenance.

Valves

All the valves are electropneumatic, utilizing bellows and Viton O-rings.

Specification for Model VS 24C

Chamber Construction

Electropolished stainless steel

Side pumped

16 sided

.70" flanges top and bottom

Dovetail grooves on inside of both flanges for tooling attachment

23" inside diameter

26" outside diameter

12" high

4" view port

2 3/4" Conflat flange RGA port

7 ea. 1" diameter feedthrough holes

Top and Bottom Plate

Electropolished stainless steel

Viton O-ring sealed

Source, tooling and feedthrough holes

.70" thick

Frame and Cabinetry

Welded steel tube frame

Adjustable feet

Formed steel panels

Hinged front and rear doors

Side panels hung with magnetic retainers

Textured enamel finish

Hoist

Heavy duty

Hydraulic electropneumatic control

Fully Interlocked

Fail safe on power loss

System/Gauge/Valve Controller

Innotec VSC Vacuum System Controller

High Vacuum Pump

CTI Cryo-Torr 8 for clean, high speed pumping

Pumping speed: 4000 l/s water

Pumping speed: 1500 l/s air

Roughing Pump

Leybold D30A, 27 cfm

High Vacuum Valve

Stainless Steel Gate Valve

8" clear aperture

Electropneumatic

Viton O-ring sealed bonnet

Bellows sealed actuator arm

Roughing Valve

Stainless steel right angle valve

1 1/2" diameter

Electropneumatic

Viton O-ring sealed bonnet

Bellows sealed stem

Foreline Valve

Stainless steel right angle valve

3/8" diameter

Electropneumatic

Viton O-ring sealed bonnet

Bellows sealed stem

Dimensions of whole system

72" high x 72" wide x 30" deep

Air

80 psig minimum

1/4 NPT

Power

208-240 VAC

3 phase

60 Amp

Individual pump and accessory breakers