Novellus Concept Two 8" CVD-W System
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Novellus Concept Two 8" CVD-W system.
WAFER SIZE: 200 mm
DUAL LOAD LOCK CASSETTE
ROBOT: Brooks MTR-5
SYSTEM CONTROLLER: QNX version 3.20
POWER RACK: DEC Klockner-Moeller
CHAMBERS: 2x CVD-W
S# DLCM0010, S# 95-49-5099
PUMPS: two Edwards QDP80-QMB-1200
RF MATCH: Trazar
GENERATOR: ENI OEM 25A-01, OEM 28B-01
GAS BOX: P# 02-024316-00
MFC: Brooks 5964
MFC 1 2 SLPM Ar
MFC 2
MFC 3 20 SLPM H2
MFC 4 20 SLPM Ar
MFC 5 500 SCCM WF6
MFC 6 2 SLPM C2F6
MFC 7 2 SLPM O2
MFC 8 10 SLPM Ar
MFC 9 20 SLPM H2
Veriflo valves
Exhaust Mantle Heat System 24 kW Watlow
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