Novellus Concept Two 8" CVD-W System

Call for price. Novellus Concept Two 8" CVD-W system.

• WAFER SIZE: 200 mm
• DUAL LOAD LOCK CASSETTE
• ROBOT: Brooks MTR-5
• SYSTEM CONTROLLER: QNX version 3.20
• POWER RACK: DEC Klockner-Moeller

• CHAMBERS: 2x CVD-W
• S# DLCM0010, S# 95-49-5099

• PUMPS: two Edwards QDP80-QMB-1200

• RF MATCH: Trazar
• GENERATOR: ENI OEM 25A-01, OEM 28B-01

• GAS BOX: P# 02-024316-00
• MFC: Brooks 5964
• MFC 1 2 SLPM Ar
• MFC 2
• MFC 3 20 SLPM H2
• MFC 4 20 SLPM Ar
• MFC 5 500 SCCM WF6
• MFC 6 2 SLPM C2F6
• MFC 7 2 SLPM O2
• MFC 8 10 SLPM Ar
• MFC 9 20 SLPM H2
• Veriflo valves
• Exhaust Mantle Heat System 24 kW Watlow

---

home     index: A-M-Z     e-mail      PTB Sales toll free: 866-332-0500