Temescal FC-1800

Fast Cycle Coating System

The Temescal FC-1800 source chamber accommodates the sources, feeders, shutter system, and planetary.

Deposition Chamber

The deposition chamber is a flanged, domed lid which accommodates the substrate holder, rotation drive, and monitor head. This design makes for easy access for loading and unloading and also minimum volume for fast cycling.

Design

The design includes an isolation valve which closes automatically on power failure, a built in jackscrew to raise and lower the source tray, an automatic pumpdown cycle control, and vertical mounting of high vacuum pump for your choice of pump, e.g.: cryo, diffusion, turbo.

Construction

Stainless steel construction of parts exposed to vacuum wherever possible, with a no. 4 finish on internal surfaces and heliarc welding with the highest quality vacuum practice.

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