YES R3 Plasma Cleaner - Single Wafer Resist Stripper

$12,500 refurbished. The YES-R3 plasma cleaner is the latest from Yield Engineering Systems YES-R1 system line.

• 325 square inch capacity
• Plasma uniformity across planar sample shelves
• 12 ¾ x 12 ¾ inch sample trays - electrode sets
• Operating settings are independent of load
• AE PE-1000

The R3 can be used in Active, Electron-free or RIE modes. It is controlled by a sequential microprocessor which allows up to 90 separate one or two gas programs to be inputted and stored in memory. Two plasma gas inputs are provided as standard with an optional third plasma gas input. A backfill input is provided as standard.

We have an R5 58 coming in and will get pictures posted then. 16x16x16 chamber.

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