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The Maxtek MDC-360 is the current model and is able to control up to four single or multi-pocket sources, control and interface with up to four single, dual or multi-crystal sensors. It has up to 99 processes, 999 layer definitions and 32 complete material definitions, a list of material and system parameters including multiple rate ramps. It is fully programable with 2.5 to 10 MHz sensor crystal support.
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Read specifications at Maxtek.