Used MKS Gauges

Model Tested 146A ask 146B w/o display $850 146C ask 152 $750 246 ask 246B $400 247C ask 250B $600 252A $500 260 PS-3 $400 270A ask 270B ask 270C-4 $850 270C-5 $1,350 274 $500

Model Tested 286 $500 287A $650 288 $350 290C-01 $550 647B ask 651C ask 652D ask 655 ask 919 $350 PDM ask PDR-C-1B ask PDR-C-1C $550 PDR-C-2 $450 PVS-2 ask

More MKS gauges below.

The Type 270 is a half-rack module that provides power and signal conditioning (oscillator, demodulator, and amplifier) for any of the 600 Series High Accuracy Baratron sensors. The 270-0 has no display for systems where the output can be read elsewhere, such as on a computer data acquisition system or DVM, while the models 270-4 and 270-5 provide front panel digital display of pressure.

The Type 274 provides operation of one, two, or three high accuracy sensors with a single Type 670 Electronics Unit. The 274 provides heater power for temperature-controlled sensors(Types 690, 698, 590). All sensors are kept warmed up and ready for reading by the 670. The 670 can sequentially read any one of the sensors, as selected by a switch on the 670's front panel, or by a remote ground closure.

With the Type 250B/E Gas Inlet Pressure/Flow Control Module. Type 250 B/E process control can be manually adjusted through a front panel potentiometer or remotely programmed with a 0 to 5 VDC analog signal for profile generating. With the multi-set point option a simple ground closure will select one of four preset set points. The basic Type 250 provides a simple analog error meter to show deviation of actual versus desired set point. It is also available with an optional 4¸ digit LED display which provides a readout of the input transducer signal and eliminates the need for a separate display instrument.

The type 647 controls six mass flow controllers with cards available per your request. The 647A, 647B and 647C replace the 147A, 147B and 147C. View the 647C literature.

Emphasis indicates surplus new. See the MKS Instruments replacement product list. There are also many manuals and other information online at MKS.

We have MKS throttle valves and MFCs in stock. The price of these instruments varies with their cards and accessories.

Digital Manuals

MKS 146C vacuum gauge and control system instruction manual.

MKS 270D vacuum gauge instruction manual.

MKS Type 919 Hot Cathode Vacuum Sensor gauge.

MKS Type 670/274 Three-channel Sensor Multiplexer.

MKS Type 250 Gas Inlet Pressure/Flow Control Module.

Used Mass Flow Controllers

Tylan

Model Gas Flow Rate Price FC-260 CL2 50 SCCM $200 FC-260 H2 50 SCCM $200 FC-260 H2 10 SCCM $200 FC-260 H2 20 SCCM $200 FC-260 H2 1 SLPM $200 FC-260* H2 2 SLPM $50 FC-260 H2 200 SCCM $50 FC-280 N2 5 SLPM ask FC-2979MEP5 O2 20 SCCM $375 FC-2979MEP5 SF6 20 SCCM $375 FC-2979MEP5 C4F6 30 SCCM $375 FC-2979MEP5 CH2F2 50 SCCM $375 FC-2979MEP5 C2F6 100 SCCM $375

STEC

Model Gas Flow Rate Price 4400 Ar 200 SCCM ask 4400RC* Ar 10 SCCM $300 7140M N2 2 SLM ask 7330M Ar 1 SLM $300 F730M He 100 SCCM $300 F730M Ar 100 SCCM ask V111DM* Ar 15 SCCM $300 V111DM N2 1 SLM ask 7340MO-UC Ar 15 SCCM $300 SFC1480AP Ar 200 SCCM $300 1480AD N2 100 SCCM ask 1480F3A Ar 1 SLM ask

MKS

Model Gas Flow Rate Price 640 N2 10 SCCM ask 649a He 50 SCCM ask 1150C-482V H2 2.0 SCCM ask 1159 He 100 SCCM $350 1179 N2 500 SCCM $350 0258C He 20 SCCM $200 1679A Ar 200 SCCM ask 1559A N2 200 SCCM $350 2179A* N2 100 SCCM $450 2179A* N2 200 SCCM $450 2259B N2 100 SCCM $400 2259C N2 20 SCCM $450

Unit

Model Gas Flow Rate Price UFC 1000* N2 200 SCCM $200 UFC 1000 N2 500 SCCM ask UFC 1000 N2 5 SLM ask UFC 1100A N2 100 SCCM ask UFC 1200A H2 500 SCCM ask UFC 1020 N2 10000 SCCM $200 UFC 1600 H2 1 SLM $200 UFM 1100* N2 2 SLM $200 MPC 1300 N2 5 SLM $200 UFC 7361 N2 200 SLM $200 UFC 1661 N2 200 SLM ask UFC 3550 H2 200 SLM ask

Misc

Model Gas Flow Rate Price LB-366 N2 10 SCCM ask 5850E Ar 50 SCCM ask 5850E O2 5000 SCCM ask AFC-261 N2 10 SLPM ask FC 7800CD H2 20 SCCM ask FMA-1700/1800 N2 1 SLPM ask GFM371 O2 50 SCCM ask M10D N2 500 SCCM ask PHM/LBO-100 - - $250 UC2-21S01 N2 100 SCCM ask

Mass flow controllers marked with an asterisk* indicate we have many in stock.

Used MKS Gauges

Model Tested 120AA-00001RA ask 170M-6B ask 170M-25B ask 170M-25C ask 170M-27D ask 170M-34C ask 170M-39A ask 170M-48A ask