| Technical Data | IC/5 |
|---|
| Crystal range and precision | 6.0 to 4.5 ± 0.047 Hz (per 100 ms sample) |
| Thickness and rate resolution | 0.006 Å (per 100-msec sample) |
| Thickness accuracy | 0.5% |
| Measurement frequency and max. update rate | 10 Hz |
| Rate control resolution | 0.1 Å/sec for 0 to 99.9 Å/sec / 1 Å/sec for 100 to 999 Å/sec |
| Source control outputs | up to 6 |
| Voltage | 0 to ± 10.0 / 0 ± 5 / 0 to ±2.5 |
| Resolution | 15 bit over the full range (10V) |
| Chart recorder output | 0 to 10V |
| Logic statements | 100 fully programmable |
| Power supply | 100 + 10%, -15% VAC 50/60 Hz, 120 + 10%, -10% VAC 50/60 Hz, 220 + 15%, -10% VAC 50/60 Hz, 240 + 10%, -10% VAC 50/60 Hz |
| Weight (lb) | 29 |
| Dimensions W x H x D (in) | 5.25 x 17.66 x 18.5 |
Please contact us for Inficon deposition rate gauges. They are sold tested with a 90 day warranty, utilizing their existing monitors.
