Used Varian Auto-Test Leak Detectors

947/948 and 947D/948D

Model Pump Rebuilt 948 diffusion $10,000 947 turbo-wet $14,000 947D turbo-dry $18,000

The Varian 947 and 948 leak detectors have single button pass/fall test cycling and automatic spectrometer tuning and calibration. The Contra-Flow vacuum system arrangement uses a valving manifold that has been designed for fast cycle times and reliability.

In addition to the front panel LED leak rate, pressure, and condition displays, information is also available on analog, parallel I/O, and RS232, remote interfaces.

While the 947 and 948 leak detectors provide high sensitivity for detecting small leaks, they can leak test to 10 atm-cc/sec. An atmospheric gross leak option allows searching for helium leaks with test port pressures as high as 760 torr. The Multi-Test option for the 947 includes atmospheric gross leak capability and a volumetric expansion procedure that detects massive leaks even if all of the internal helium has escaped from the part prior to the test. Multi-Test can be used with parts that have net internal volumes greater than 6 cc.

Technical Specifications

Sensitivity

• 2 x 10^-10 atm cc/sec (helium)- Turbo version
• 2 x 10^-9 atm cc/sec (helium)- MacroTorr version

Leak Indications

A 50-segment bar graph indicator displays leak rates from 10 to 1 x 10^-10 atm cc/sec automatically. The manual mode can be used for any decade scale. A leak can also trigger an audible alarm whose frequency varies in proportion to the size of the leak.

High Vacuum Pump

V70 turbo or V70D MacroTorr air-cooled, maintenance-free pump

Rough Pump

7 cfm (11.9m³/h) direct drive mechanical pump, Optional: 17cfm (28.9m³/h)

Test Port

1^1/8 (28mm) ID quick coupling type, KF25 adaptor included

Weight

435 lbs. approx. net, 510 lbs. approx. shipping