Valve Sequence Controller

HSD Engineering Vacuum Equipment Design

These units provide output to actuate seven system valves, two pumps and three user definable devices. This allows "hands off" control of pump down from atmosphere to high vacuum as well as control of heat, deposition and other process equipment.

In addition to the standard pressure inputs provided, five inputs are available for connection to external monitoring devices which can be used as interlocks or process control inputs. This powerful combination can provide control of a complete deposition cycle from high vacuum pump down to gas inlet with shutter actuation, deposition power and cycle termination.

A library of programs is available to allow control of the various pumping mechanisms in current use. The cryo program provides automated pump regeneration while the turbo program provides "fail safe" pump venting to prevent oil back-migration. The diffusion pump program provides a shut-down sequence to allow boiler cooldown before automatic pump power down.

New $3,000

• Ten foot interface cable to system valves and pump motor starters.
• Key locked manual mode provides secured access to toggle switch control of all outputs. Manual mode will operate during complete failure of the PLC.
• Floating 24 VDC power supply to all inputs allowing use of contact closure devices.
• Eleven standard outputs are 120 VAC, 2 Amp rating with output #12 isolated to allow connection of other voltage.
• Graphic panel with LED indication of status for all outputs.
• Units shipped with choice of standard programs.
• Programs are field changeable on 2764 EPROMs.
• 700 word capacity PLC.
• Free software available for PC program development.
• Standard interface to Granville-Phillips 307 or 340 ionization gauge controller with T/C or Convectron® option and six channel process control board.
• Dimensions:  9.5" rack mountable x 3.5"H x 11"D