Rebuilt Varian VHS Diffusion Pumps
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The Varian VHS-Series bulge contour increases gas capture and maintains lower pressure for the process. VHS pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging fluid life. Full thermal protection and quick-cool coils are also standard. Please specify your need of standard or extended cold caps, and heater voltage.
We also carry Varian diffusion pump liquid N2 Traps.
VHS 4, 6, 10
| Specification | VHS-4 0183 | VHS-6 0184 | VHS-10 0185 | |||
|---|---|---|---|---|---|---|
| Speed (l/s) | ||||||
| Air | 1,200 | 2,400 | 5,300 | |||
| Hydrogen | 1,600 | 3,200 | 7,000 | |||
| Helium | 1,500 | 3,000 | 6,600 | |||
| Normal Operating Range | 2 x 10E-3 to 5 x 10E-9 | 1 x 10E-3 to 5 x 10E-9 | ||||
| Untrapped, Torr | 2.6 x 10E-3 to 6.5 x 10E-9 | 1.3 x 10E-3 to 6.5 x 10E-9 | ||||
| Max. Fore pressure, Torr | ||||||
| No load | 0.65 | |||||
| Full load | 0.55 | |||||
| Max. Throughput, @ 1 x 10-2 Torr | 2.5 | 3.5 | 7.7 @ 4400 W | |||
| 8.1 @ 5100 W | ||||||
| Min. Recommended Backing Pump for Max. Throughput | ||||||
| cfm | 10 | 17 | 30 | |||
| Backstreaming Rate @ inlet flange | ||||||
| (mg/cm2/min) | 5 x 10-4 | |||||
| Warmup Time (min) | 10 | 15 | ||||
| Cooldown Time (min) w/ Quick Cool Coil where applicable | 10 | 25 | ||||
| Fluid Charge | 300 cm3 | 500 cm3 | 1,000 cm3 | |||
| Electrical Requirements | 1 Φ | 3 Φ | ||||
| 50 / 60 Hz | ||||||
| 120 / 240 V | 240 / 480 V | |||||
| Power (Watts) | 1450 | 2200 | 4400/5100 | |||
| Cooling water gpm @ 60-80 °F (15-26 ) | 0.15 | 0.25 | 0.40 | |||
Digital Manuals
Varian VHS-4
Varian VHS-6
Varian VHS-10, VHS-400
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