Rebuilt Varian VHS Diffusion Pumps
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The Varian VHS Series bulge contour increases gas capture and maintains lower pressure for the process. VHS pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging fluid life. Full thermal protection and quick-cool coils are also standard. Please specify your need of standard or extended cold caps, and heater voltage.
We also carry Varian Diffusion Pump LN2 Traps.
VHS 4, 6 & 10
| Specifications |
VHS-4
0183 |
VHS-6
0184 |
VHS-10
0185 |
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|---|---|---|---|---|---|---|
| Speed (l/s) | ||||||
| Air | 1,200 | 2,400 | 5,300 | |||
| Hydrogen | 1,600 | 3,200 | 7,000 | |||
| Helium | 1,500 | 3,000 | 6,600 | |||
| Normal Operating Range |
2 x 10E-3 to
5 x 10E-9 |
1 x 10E-3 to 5 x 10E-9 | ||||
| Untrapped, Torr |
2.6 x 10E-3 to
6.5 x 10E-9 |
1.3 x 10E-3 to 6.5 x 10E-9 | ||||
| Max. Fore pressure, Torr | ||||||
| No load | 0.65 | |||||
| Full load | 0.55 | |||||
| Max. Throughput, @ 1 x 10-2 Torr | 2.5 | 3.5 | 7.7 @ 4,400 W | |||
| 8.1 @ 5,100 W | ||||||
| Min. Recommended Backing Pump for Max. Throughput | ||||||
| cfm | 10 | 17 | 30 | |||
| Backstreaming Rate @ inlet flange | ||||||
| (mg/cm2/min) | 5 x 10-4 | |||||
| Warmup Time (min) | 10 | 15 | ||||
| Cooldown Time (min) w/ Quick Cool Coil where applicable | 10 | 25 | ||||
| Fluid Charge | 300 cm3 | 500 cm3 | 1,000 cm3 | |||
| Electrical Requirements | 1 Φ | 3 Φ | ||||
| 50/60 Hz | ||||||
| 120/240 V | 240/480 V | |||||
| Power (Watts) | 1,450 | 2,200 | 4,400/5,100 | |||
| Cooling water gpm @ 60-80 °F (15-26 ) | 0.15 | 0.25 | 0.40 | |||
Digital Manuals
Varian VHS-4
Varian VHS-6
Varian VHS-10, VHS-400
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