Inland Diffusion Pump Oils
| Product | 100 ml | 500 ml | 1 liter | 1 gal | 5 gal | 55 gal |
|---|---|---|---|---|---|---|
| Invoil | $38 | $111 | $153 | $312 | $1,350 | * |
| Invoil S | $52 | $130 | $239 | $663 | * | * |
| Invoil 20 | - | - | $34 | $89 | $369 | $2,532 |
| Invoil 30 | - | - | - | $133 | $569 | $2,820 |
| Invoil 37 | - | - | - | $123 | $531 | $3,032 |
| Invoil 40 | - | - | - | - | $360 | $1,836 |
| Invoil 42 | - | - | - | $76 | $360 | $1,970 |
| Invoil 44 | - | - | - | $482 | $2,035 | * |
| Invoil 46 | - | - | $134 | $414 | $1,778 | * |
| Invoil 940 | $43 | $111 | $206 | $730 | $3,141 | * |
| Invoil 702 | - | $90 | - | $570 | $2,622 | * |
| Invoil 704 | $43 | $111 | $206 | $730 | $3,141 | * |
| Invoil 705 | - | $189 | $363 | $1,257 | $5,344 | * |
| Santovac 5 | $270 | $1,086 | $2,172 | $5,580 | * | - |
| 5 P Ultra | $377 | $1,640 | - | $6,672 | - | - |
* indicates that these quantities are available but prices are given at the time of the request.
The ideal diffusion pump fluid should be thermally stable, non-volatile, chemically inert and not-toxic. Real diffusion pump fluids, on the other hand, represent compromises between these properties; no one fluid does it all. PTB Sales offers a broad range of Inland Vacuum diffusion pump fluids, including hydrocarbon, inert PFPE, polyphenyl ether and silicone fluids for a wide range of applications.
The benefits of selecting the proper fluid include:
- Use of the most cost-effective fluid for a given application
- Better pumping speed
- Reduced maintenance
- Increased reliability
A double distilled hydrocarbon, such as Invoil 20, will perform extremely well in less severe processes such as decorative coating, metallizing, sputtering, and applications with large gas loads. Optical coating, wafer processing, and other deposition processes require the excellent ultimate pressure and low backstreaming characteristics of a silicone fluid to assure that the fluid will not contaminate the substrate or the process chamber. Silicone pump fluids are very durable, possessing excellent thermal and chemical stability.
Invoil 20
- Double distilled hydrocarbon fluid
- High resistance to corrosive attack
- Low vapor pressure
- Reduced backstreaming
- Recommended for mechanical, diffusion, and turbomolecular pumps
- Invoil 20 MSDS
Application
- Thin film sputtering
- Furnaces
- Metallization
- Mass spectrometer
Invoil 702
- Silicone based fluid
- Resistant to oxidation
- Quick pumpdown cycles
- Thermal stability
Application
- TV tubes
- EB welders
- Metallization
Invoil 704
- Silicone based fluid
- Superior vapor pressure capabilities
- Resistant to oxidation
- Thermal stability
- Quick pumpdown cycles
Application
- Vacuum coating
- Metallurgical work
- Thin film sputtering
- EB welders
Invoil 705
- Silicone based fluid
- Extremely low vapor pressure capabilities
- Little or no backstreaming
- Ultra high, ultra clean vacuum
Application
- UHV systems
- TV tubes
- Surface analysis
- Mass spectrometer
Technical Data
| # | Vapor Pressure @ 25°C | Boiling Point @ .01 Torr | Viscosity @ 40°C | Pour Point | Flash Point | Fire Point | Density @ 25°C |
|---|---|---|---|---|---|---|---|
| torr | °C | cSt | °C | °C | °C | g/mL | |
| 20 | 3 x 10-6 | 127 | 58 | -10 | 224 | 259 | .87 |
Technical Data
| # | Vapor Pressure @ 25°C | Boiling Point @ .5 Torr | Viscosity @ 40°C | Pour Point | Flash Point | Fire Point | Density @ 25°C |
|---|---|---|---|---|---|---|---|
| torr | °C | cSt | °C | °C | °C | g/mL | |
| 702 | 3.3 x 10-6 | 190 | 26.8 | <0 | 193 | none | 1.07 |
| 704 | 2 x 10-8 | 210 | 24.2 | <9 | 221 | none | 1.07 |
| 705 | 2.4 x 10-9 | 243 | 66 | <0 | 243 | none | 1.09 |
Fomblin
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