Inland Diffusion Pump Oils

Product	100 ml	500 ml	1 liter	1 gal	5 gal	55 gal
Invoil	$38	$111	$153	$312	$1,350	*
Invoil S	$52	$130	$239	$663	*	*
Invoil 20	-	-	$34	$89	$369	$2,532
Invoil 30	-	-	-	$133	$569	$2,820
Invoil 37	-	-	-	$123	$531	$3,032
Invoil 40	-	-	-	-	$360	$1,836
Invoil 42	-	-	-	$76	$360	$1,970
Invoil 44	-	-	-	$482	$2,035	*
Invoil 46	-	-	$134	$414	$1,778	*
Invoil 940	$43	$111	$206	$730	$3,141	*
Invoil 702	-	$90	-	$570	$2,622	*
Invoil 704	$43	$111	$206	$730	$3,141	*
Invoil 705	-	$189	$363	$1,257	$5,344	*
Santovac 5	$270	$1,086	$2,172	$5,580	*	-
5 P Ultra	$377	$1,640	-	$6,672	-	-

* indicates that these quantities are available but prices are given at the time of the request.

The ideal diffusion pump fluid should be thermally stable, non-volatile, chemically inert and not-toxic. Real diffusion pump fluids, on the other hand, represent compromises between these properties; no one fluid does it all. PTB Sales offers a broad range of Inland Vacuum diffusion pump fluids, including hydrocarbon, inert PFPE, polyphenyl ether and silicone fluids for a wide range of applications.

The benefits of selecting the proper fluid include:

Use of the most cost-effective fluid for a given application
Better pumping speed
Reduced maintenance
Increased reliability

A double distilled hydrocarbon, such as Invoil 20, will perform extremely well in less severe processes such as decorative coating, metallizing, sputtering, and applications with large gas loads. Optical coating, wafer processing, and other deposition processes require the excellent ultimate pressure and low backstreaming characteristics of a silicone fluid to assure that the fluid will not contaminate the substrate or the process chamber. Silicone pump fluids are very durable, possessing excellent thermal and chemical stability.

Invoil 20

Double distilled hydrocarbon fluid
High resistance to corrosive attack
Low vapor pressure
Reduced backstreaming
Recommended for mechanical, diffusion, and turbomolecular pumps
Invoil 20 MSDS

Application

Thin film sputtering
Furnaces
Metallization
Mass spectrometer

Invoil 702

Silicone based fluid
Resistant to oxidation
Quick pumpdown cycles
Thermal stability

Application

TV tubes
EB welders
Metallization

Invoil 704

Silicone based fluid
Superior vapor pressure capabilities
Resistant to oxidation
Thermal stability
Quick pumpdown cycles

Application

Vacuum coating
Metallurgical work
Thin film sputtering
EB welders

Invoil 705

Silicone based fluid
Extremely low vapor pressure capabilities
Little or no backstreaming
Ultra high, ultra clean vacuum

Application

UHV systems
TV tubes
Surface analysis
Mass spectrometer

Technical Data

#	Vapor Pressure @ 25°C	Boiling Point @ .01 Torr	Viscosity @ 40°C	Pour Point	Flash Point	Fire Point	Density @ 25°C
	torr	°C	cSt	°C	°C	°C	g/mL
20	3 x 10^-6	127	58	-10	224	259	.87

Technical Data

#	Vapor Pressure @ 25°C	Boiling Point @ .5 Torr	Viscosity @ 40°C	Pour Point	Flash Point	Fire Point	Density @ 25°C
	torr	°C	cSt	°C	°C	°C	g/mL
702	3.3 x 10^-6	190	26.8	<0	193	none	1.07
704	2 x 10^-8	210	24.2	<9	221	none	1.07
705	2.4 x 10^-9	243	66	<0	243	none	1.09

Fomblin

Product	1 Kg	2 Kg	8 Kg
Y18/8	$504	$1,008	$3,360
Y25/9	$504	$1,008	$3,360
Y40/11	$504	$1,008	$3,360
Y140/13	$504	$1,008	$3,360