Ebara (Genesis) ICP 200 & Surplus Compressors
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Genesis purchased Ebara Technologies' cryopump product Line on June 30, 2001, including all patents and technical rights. All engineering, manufacturing, and in-house service support were retained from Ebara Technologies, Inc.
The ICP200 as an FS Eight pump has an 8 inch can with a 10 inch ASA flange, made for Varian 3190 systems, and are surplus new.
Specifications
| Specifications | ICP 200 | |
|---|---|---|
| Pump Speed (l/s) | Nitrogen | 1500 |
| Hydrogen | 2200 | |
| Argon | 1200 | |
| Water | 4000 | |
| Reachable Pressure | Torr | 10-9 |
| Max. Flow Rate for Argon | Torr l/s | 10.0 |
| Pump Capacity (l) | Argon | 1100 |
| Hydrogen | 30 | |
| Crossover | Torr ltr. | 300 |
| Cooldown Time | min | 85 |
| Regeneration Time | Full | 115 |
| Quick | 45 | |
| Weight | lb | 49 |
Surplus Compressors
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The 2.1 Compressor is a closed loop system that supplies high-purity helium to cryo refrigerators and cryopumps. The compressor consists of a water-cooled oil-lubricated compressor, a two-stage filtering system that removes oil aerosol from the high-pressure helium stream, an interlock system to prevent damage to the compressor, and a power supply to run the compressor and expander. LED's on the front and rear panels indicates operational and alarm status. Two models are available: Model 631-1200 for 50Hz, 230V operation, and Model 631-1300 for 60Hz, 208V operation. The compressor capsule in both models operates on single-phase power
The compressor capsule is built around a reciprocating-piston type compressor. Heat developed by the compression process and motor losses are removed by a water-cooling jacket surrounding the compressor capsule, and a helium and oil heat exchanger attached to the water-cooling jacket. Oil, which lubricates the compressor, leaves the heat exchanger in the high filtering system before leaving the compressor module and entering the expander.
| 2.1 Specifications | |
|---|---|
| Height | 512 mm |
| Width | 473 mm |
Depth | 531 mm |
Weight | 200 lb (90.7 kg) |
| Phase | 1 Φ |
| Frequency | 50 / 60 Hz |
| Voltage | 208± 10% VAC |
| Operating current | 14 A |
| Starting current | 43 ~ 47 A |
| Gas | Helium |
| Purity | 99.995 % min, -63°C Dew Point |
| Charge Pressure | 210 Psi ± 5 Psi 1.448 Mpa ± 34 Kpa @ 20 °C |
| Flow rate | 1 gal/min 3.8 l/min |
| Temperature | Inlet 10°C to 27°C |
| Cooling water heat radiation | 2.6 kW |
| Temperature | 5°C to 40°C |
| Humidity | 30 % to 95 % |
| Altitude | Max. 3048 m |
| Noise | Max. 70 dB(A) |
The HC70 compressor is built around a high-performance scroll compressor. This significantly extends durability while reducing vibration, noise, maintenance and operating cost. A water-cooled heat exchanger provides the cooling capacity to remove up to a 6.0 KW heat load.
This highly reliable compressor has the power and capability to drive up to four pumps. The only maintenance required is an adsorber change every 30,000 hours (3 years). The HC70 is a cost effective solution for applications where multiple pumps are used.
| HC 70 Specifications | |
|---|---|
| Height | 22 in |
| Width | 19.5 in |
| Depth | 21 in |
| Weight | 275 lb (124.7 kg) |
| Phase | 3 Φ |
| Frequency | 50 / 60 Hz |
| Voltage | 200 / 200 - 230 ± 10% VAC |
| Operating current | 19 / 21 A |
| Starting current | 131- 151 A |
| Gas | Helium |
| Purity | 99.995 % min, -80°F Dew Point |
| Charge Pressure | 210 ± 5 psi @ 20 °C |
| Flow rate | 2 gal/min |
| Temperature | Inlet 4°C to 29°C |
| Cooling water heat radiation | 6.0 kW |
| Temperature | 5°C to 40°C |
| Humidity | 30% to 95% |
| Altitude | Max. 3048 m |
| Noise | Max. 70 dB(A) |