Rebuilt Varian HS Diffusion Pumps
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These diffusion pumps come with full thermal protection and quick-cool coils. HS-16 through 35 come with sight glass/fill and drain assemblies. Our HS-32 pumps have 32" ASA flanges. The Varian HS-20 pump is wired for either 208V or 240V. For $1,500 we will convert them to 480V.
We also carry Varian Diffusion Pump LN2 Traps and Valves
| Model Number: Type | HS-16 0164 | HS-20 0165 | HS-32 0167 | NHS-35 0169 |
|---|---|---|---|---|
| Speed (l/s) | ||||
| Air | 10,000 | 17,500 | 32,000 | 50,000 |
| Hydrogen | 12,500 | 22,000 | 40,000 | 62,500 |
| Helium | ||||
| Normal Operating Range | 1 x 10E-3 to <5 x 10E-8 | 8 x 10E-4 to <5 x 10E-8 | ||
| Untrapped, Torr | 1.3 x 10E-3 to 6.5 x 10E-9 | 1 x 10-3 to <6.5 x 10-8 | 1 x 10E-3 to <6.5 x 10E-8 | 6.5 x 10E-4 to <6.5 x 10E-8 |
| Max. Fore pressure, Torr | ||||
| No load | 0.65 | 0.50 | 0.55 | |
| Full load | 0.55 | 0.35 | 0.40 | |
| Max. Throughput, @ 1 x 10-2 Torr | 12.5 @ 8,100 W | 18 | 35 | |
| 13.5 @ 9,600 W | ||||
| Min. Recommended Backing Pump for Max. Throughput | ||||
| cfm | 80 | 100 | 300 | |
| Backstreaming Rate @ inlet flange | ||||
| (mg/cm2/min) | 1.5 x 10-3 | 7 x 10-4 | 5 x 10-4 | |
| Warmup Time (min) | 30 | 45 | 30 | 60 |
| Cooldown Time (min) w/ Quick Cool Coil where applicable | 60 | |||
| Fluid Charge | 3 Qts. (2.8 l) | 5 Qts. (4.7 l) | 3 Gal. (11.4 l) | |
| Electrical Requirements | 3 Φ | |||
| 50/60 Hz | ||||
| 240/480 V | ||||
| Power (Watts) | 8,100/9,600 | 12,000 | 24,000 | 24,000 |
| Cooling water U.S. gpm @ 60-80 °F (15-26 ) | 1.5 | 1.5 | 4.0 | 4.0 |
| Weight (lbs) | 500 | 600 | 1,500 | 1,500 |
HS-2 Specifications
| Combinations | HS-2 |
|---|---|
| Speed (l/s) | 285 |
| Ultimate pressure, Torr | <1 x 10E-8 |
| Backstreaming rate at inlet (mg/cm2/min) | 1 x 10E-3 |
| Total height, in. (mm) | 12.69 (322.3) |
| Speed (l/s) | 145 |
| Ultimate pressure, Torr | 1 x 10E-8 |
| Backstreaming rate @ inlet (mg/cm2/min) | 5 x 10E-5* |
| Total height, in. (mm) | 14.69 (373.1) |
| Water-cooled baffle model | 332 |
| Speed (l/s) | 115 |
| Ultimate pressure, Torr | <1 x 10E-7 |
| Backstreaming rate @ inlet (mg/cm2/min) | 5 x 10E-5* |
| Total height, in. (mm) | <18.19 (462.0) |
| Water-cooled baffle model | 332 |
| Speed (l/s) | 175 |
| Ultimate pressure, Torr | 5 x 10E-9 |
| Backstreaming rate @ inlet (mg/cm2/min) | 1 x 10E-7 |
| Total height, in. (mm) | 19.69 (500.1) |
| LN2 Duration (hrs) | 7.5 |
| Cryotrap model | 325 |
| Speed (l/s) | 135 |
| Ultimate pressure, Torr | 1 x 10E-8 |
| Backstreaming rate @ inlet (mg/cm2/min) | ~1 x 10E-7 |
| Total height, in. (mm) | <23.44 (595.4) |
| LN2 Duration (hrs) | 7.5 |
| Cryotrap model | 325 |
| Speed (l/s) | 90 |
| Ultimate pressure, Torr | 1 x 10E-8 |
| Backstreaming rate @ inlet (mg/cm2/min) | 1 x 10E-8 (1.3 x 10E-7) |
| Total height, in. (mm) | 25.44 (646.2) |
| LN2 Duration (hrs) | 7.5 |
| Water-cooled baffle, cryotrap | (see above) |
Digital Manuals
- Varian HS-20
- Varian HS-32
- Varian HS-16, HS-20, HS-32, NHS-35