Rebuilt Varian Diffusion Pumps
M2, M4, M6
|
|
We also carry Varian Diffusion Pump Ln2 Traps
| Model |
M2
0189 |
M4
0187 |
M6
0188 |
||
|---|---|---|---|---|---|
| Speed (l/s) | |||||
| Air | 175 | 800 | 1,500 | ||
| Hydrogen | 210 | 1,000 | 1,800 | ||
| Helium | |||||
| Operating Range Untrapped, Torr |
2 x 10-3
to
< 5 x 10-8 |
1 x 10-3
to
< 5 x 10-9 |
|||
| Max. Forepressure Torr | |||||
| No load | 0.55 | 0.65 | 0.70 | ||
| Full load | 0.40 | 0.45 | 0.60 | ||
| Max. Throughput | |||||
| @ 1 x 10-2 Torr-l/s | 0.65 | 1.5 | 2.4 | ||
| Min. Recommended Backing Pump for Max. Throughput | |||||
| cfm | 5 | 10 | 11 | ||
| Backstreaming Rate at inlet flange | |||||
| (mg/cm2/min) | 1 x 10-3 | 1 x 10-4 | |||
| Warmup Time (min) | 10 | 12 | |||
| Cooldown Time (min) w/ Quick Cool Coil where applicable | 30 | 20 | |||
| Fluid Charge | 100 cm3 | 250 cm3 | 400 cm3 | ||
| Electrical Requirements | 1 Φ | ||||
| 50 / 60 Hz | |||||
| 120 / 240 V | |||||
| Power (Watts) | 450 | 1190 | 1785 | ||
| Cooling water gpm @ 60-80 °F (15-26) | 0.1 | 0.15 | 0.2 | ||
Go to Varian for current user manuals.
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