Rebuilt BOC Edwards iH & iL Dry Pumps

Model	cfm	hp	kW	Rebuilt
L70	49	3	2.2	ask
iL70N	49	3	2.2	$12,000
iH80	61	5.0	3.5	$16,000
iH600	353	8.7	6.1	$19,000
iL600N	353	8.7	6.1	ask
iH1000	589	-	6.1	ask

BOC Edwards iH and iL system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination.

Gas Module: controls nitrogen purges and monitors exhaust pressure.
Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
Electrics Module: used for low voltage power requirements.
Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.

iH & iL Technical Data

Dry Pump	L 70	iL 70	iH 80	iH 600
Source Frequency	60Hz
Peak Speed
(m³h^-1)	84	84	103	600
cfm	49	49	61	353
Ultimate Vacuum
mbar	3 x 10^-2	3 x 10^-2	1 x 10^-2	7 x 10^-4
torr	2.3 x 10^-2	2.3 x 10^-2	8 x 10^-3	5 x 10^-4
Typical shaft-seal N2 flow (slm)	0	0/4	4	4
Motor power (kW)	2.2	2.2	3.5	6.1
Input @ vacuum (kW)	1.5	1.5	2.7	3.4
Inlet Connection	ISO 63	ISO 63	ISO 63	ISO 100
Outlet Connection	NW40	NW40	NW40	NW40
Weight (kg)	210	230	240	405

Digital Manuals

iH dry pump instruction manual.
iH, L70 and iL70N specifications.

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