Rebuilt Edwards IPX & EPX Dry Pumps
The IPX 100A is rebuilt by Edwards with warranty, and offers rapid pump down from atmosphere to less than 4 x 10-3 torr. IPX 100A differs from the IPX 100 in the orientation of the electrical boxes. The compact EPX 180N offers enhanced performance with reduced cost of ownership, and is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr. The N series includes a gas module that provides nitrogen purge extending the application range to medium processes in which low levels of corrosive vapors and particulates are expected.
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Specifications
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IPX 100A
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EPX 180N
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Peak speed (cfm)
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59
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105
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Ultimate vacuum mbar (Torr)
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<5 x 10-3 (<4 x 10-5)
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<1 x 10-4 (<7 x 10-5)
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Typical shaft seal nitrogen flow (slm)
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0
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Typical cooling-water flow l/h
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120
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300
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Power input at ultimate (kW)
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2.1
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1.4
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Rated motor power (kW)
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3.8
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3.0
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Noise (db A)
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56
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<59
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Oil capacity (l)
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0.3
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-
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Inlet connection
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NW40
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ISO63
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Outlet connection
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NW25
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Weight (kg)
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55
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43.5
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Applied Materials note: some IPX 100 (3620-00102) pumps were removed from inventory due to a reset switch configuration discrepancy. These were meant as a dry style load lock pump.
Used IPUP Dry Pumps
The iPUP (Integrated Point of Use Pump) has been jointly developed with Applied Materials to meet load lock and transfer requirements. These dry pumps are designed for point of use installation in cleanroom environments and replace larger remote dry pumps located far away from the process tools. They are compact, clean, quiet and energy efficiency.
Digital Manuals
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