Rebuilt BOC Edwards iQDP Dry Pumps
 | | Model | cfm | hp | kW | Rebuilt |
|---|
| iQDP40 | 36.7 | 3.0 | 2.2 | $10,500 | | iQDP80 | 64.7 | 5.4 | 4.0 | $13,000 | | QDP40 | 36.7 | 3.0 | 2.2 | ask | | QDP80 | 64.7 | 5.4 | 4.0 | ask | | DP40 | 36.7 | 3.0 | 2.2 | ask | | DP80 | 64.7 | 5.4 | 4.0 | ask | | DP160 | - | - | - | ask | | DP180 | - | - | - | ask |
|
The BOC Edwards iQ pump consists of the iQDP40 and iQDP80 dry pumps with the option of QMB250F, QMB500F and QMB1200F mechanical booster pumps, combined to suit particular applications.
One year warranty on rebuilt used BOC Edwards Drystar pumps. Sound enclosure panels, various nitrogen purge configurations and other features can be provided per quote.
iQDP Technical Data
| | iQDP40 / QDP40 / DP40 | iQDP80 / QDP80 / DP80 |
|---|
| | 60Hz |
| Peak Speed |
| (m3h-1) | 55 | 96 |
| cfm | 32 | 56.4 |
| Displacement |
| m3h-1 | 62 | 110 |
| cfm | 36.7 | 64.7 |
| Ultimate Vacuum |
| mbar | 3 x 10-2 | 1 x 10-2 |
| Torr | 2 x 10-2 | 8 x 10-3 |
| Inlet Connection | ISO 40 bolted | ISO 63 Bolted |
| Outlet Connection | NW 40 | NW 40 |
| Power input @ vacuum (kW) | 1.3 | 3.1 |
| Motor power (kW) | 2.2 | 4.0 |
| Weight (kg) | 186 | 216 |
Tool Interface Modules
Tool interface and communications modules (iH/iL series) for enhanced control through the process tool and connection to PC-based Fabworks software which monitors and logs data from up to 1,000 devices including pumps and exhaust management systems; and a pump display module for monitoring and manual operation of the iL series. BOC Edwards has also developed the Tool Interface Module to connect semiconductor dry pump systems to all existing and new semiconductor tools.
Digital Manuals
- QDP 40 80 installation, operation and maintenance.
- DP 180 instruction manual.
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