![]() |
|
These sputter ion pumps are sold cleaned-tested or rebuilt. The Varian VacIon includes Diode, Triode, Noble Diode, and StarCell pumps. Also included are non-evaporable getter (NEG) or titanium sublimation combination pumps (TSP.)
The diode version of the Vaclon pump is designed for pumping oxygen, carbon dioxide, carbon monoxide, and any other getterable gas, as well as hydrogen.
The Noble Diode VacIon pump is a version of the Diode VacIon in which a tantalum cathode is substituted in place of a titanium cathode. This substitution allows a higher pumping speed and stability for pumping noble gases e.g. argon and helium.
In a Triode VacIon pump the cathode is made of an open grid arrangement and is powered with negative high voltage, while the anode assembly is grounded. This configuration allows pumping gases at relatively high pressures.
The StarCell VacIon Plus is the most recent version of the Triode style. It is designed with the intention to pump a high amount of noble gases as well as others like hydrogen, methane, argon, and helium.
Varian Ion Pump literature.