Rebuilt Seiko Seiki Turbo Pumps
 | | Model | Rebuilt | | STP-300 | $7,000 | | STP-301CB1 | $9,500 | | STP-400 | $8,500 | | STP-451C | $9,000 | | STP-600 | $14,000 | | STP-H600 | $19,500 | | STP-603 | $19,500 | | STP-803 | $20,500 | | STP-A803C | $21,000 | | STP-1000 | $16,500 | | STP-1000C | $19,500 | | STPH200C | ask | | STP-H1000C | ask | |
The Seiko Seiki turbo pumps use magnetically levitated bearings, which have several benefits. There is no risk of vacuum contamination, a vital feature in semiconductor and scientific applications where even the minutest impurity will affect results. Noise levels are low and vibration is almost imperceptible - the peak-to-peak level is less than 0.02 mµ, an amplitude which remains constant throughout the life of the pump and is free from troublesome sub-harmonics. Magnetic bearings do not need maintenance, an important factor in processes producing chemical or radioactive contamination.
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch.
| Item | STP-300 | STP-600 | STP-1000 | STP-2000 |
| Flange size | Inlet flange | ISO100/6"CF | ISO160 | ISO200 | ISO250/12"CF |
| Outlet flange | NW25 | NW40 |
| Pumping speed (l/s) | N2 | 340 | 650 | 1000 | 2000 |
| He | 330 | 600 | 900 | 1800 |
| H2 | 310 | 550 | 800 | 1600 |
| Compression Ratio | N2 | >108 |
| He | 2 x 105 | 107 | 105 |
| H2 | 1 x 104 | 105 | 104 |
| Ultimate Pressure Pa(Torr) | 10-8 | 10-9 |
| Rated speed (rpm) | 48,000 | 35,000 | 27,000 |
| Starting time (min) | 10 | 6 | 7 |
| Vibration µm (P-P) | <0.01 |
| Baking Temp. (°C) | <120 |
| Lubricating oil | Not necessary |
| Installation position | Free |
| Type of cooling | Spontaneous cooling |
| Standard aux. pump (l/min) | 240 | 340 | 540 |
| Weight (kg) |
| Pump | 12 | 30 | 31 | 65 |
| Controller | 27 | 21 | 40 |
| Item | STP-H300 | STP-H600 | STP-H1000 | STP-H2000 |
| Flange size | Inlet flange | ISO100/6"CF | ISO160 | ISO200 | ISO250/12"CF |
| Outlet flange | NW25 | NW40 |
| Pumping speed (l/s) | N2 | 320 | 600 | 1000 | 2000 |
| He | 290 | 550 | 900 | 1800 |
| H2 | 250 | 500 | 800 | 1600 |
| Compression Ratio | N2 | >108 |
| He | 2 x 105 |
| H2 | 104 | 105 | 103 |
| Ultimate Pressure Pa(Torr) | 10-10 | 10-7(10-9) after baking | 10-9 |
| Maximum Inlet pressure (Torr) | Cooled with air/water: | - | 0.50/0.04 | 0.13/0.01 |
| Maximum Outlet pressure (Torr) | Cooled with air/water: | - | 4/3 | 3/3 |
| Rated speed (rpm) | 48,000 | 35,000 | 27,000 |
| Starting time (min) | 10 | 6 | 7 |
| Vibration µm (O-P) | <0.01 | <0.02 |
| Baking Temp. (°C) | <120 |
| Lubricating oil | - | Not necessary | - |
| Installation position | - | Free | - |
| Standard aux. pump (l/min) | - | 240 | - |
| Weight (kg) | 20 | 35 | 65 |
| Dimensions(mm) | - | Φ245 x H339 | Φ245 x H319 | - |
| Ambient temp. range (°C) | 0 to 40 |
| Storage temp. range (°C) | -25 to +55 |
Digital Manuals
STP H600/H1000
- Intro, Table of Contents, and Precautions for safe operation
- Precautions continued and Installation
- Operation
- Operation continued
- Operation continued, Internal Battery and External Battery
- Installation of External Battery, Maintenance and Inspection, Storage and Disposal
- Trouble Shooting
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