Rebuilt Seiko Seiki Turbo Pumps

STP
ModelRebuilt
STP-H200C ask
STP-300Cask
STP-300H ask
STP-301CB1 ask
STP-301Hask
STP-301CVB3 ask
STP-400 ask
STP-451 $8,000
STP-451C ask
STP-H451C ask
STP-600 $10,000
STP-600Cask
STP-H600Cask

STP
ModelRebuilt
STP-603 ask
STP-603C ask
STP-803 ask
STP-A803C ask
STP-H803Cask
STP-1000 ask
STP-1000C ask
STP-H1000C ask

STP
ModelRebuilt
STP-1003Cask
STP-H1301C ask
STP-H1301 ask
STP-H1301L1ask
STP-H1303CV3 ask
STP-A1303C $21,000
STP-A1603C ask
STP-A1603P ask
STP-H2000C $15,000
STP-H2000K2ask
STP-H2001C1ask
STP-H2001K2ask
STP-H2002Cask

STP
ModelRebuilt
STP-A2203Cask
STP-A2203LVSask
STP-A2203PV ask
STP-F2203C ask
STP-A2503PV ask
STP-XH2603Pask

The Seiko Seiki turbo pumps use magnetically levitated bearings, which have several benefits. There is no risk of vacuum contamination, a vital feature in semiconductor and scientific applications where even the minutest impurity will affect results. Noise levels are low and vibration is almost imperceptible - the peak-to-peak level is less than 0.02 mµ, an amplitude which remains constant throughout the life of the pump and is free from troublesome sub-harmonics. Magnetic bearings do not need maintenance, an important factor in processes producing chemical or radioactive contamination.

An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.

Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.

SpecificationsSTP-300STP-600STP-1000STP-2000
Flange sizeInlet flangeISO100/6"CFISO160ISO200ISO250/12"CF
Outlet flangeNW25NW40
Pumping speed (l/s)N2 3406501,0002,000
He 3306009001,800
H2 3105508001,600
Compression RatioN2 >108
He 2 x 105 107 105
H2 1 x 104 105 104
Ultimate Pressure   Pa(Torr)10-8 10-9
Rated speed (rpm)48,00035,00027,000
Starting time (min)1067
Vibration µm (P-P)<0.01
Baking Temp. (°C)<120
Lubricating oilNot necessary
Installation positionFree
Type of coolingSpontaneous cooling
Standard aux. pump (l/min)240340540
Weight (kg)
Pump12303165
Controller272140

SpecificationsSTP-H300STP-H600STP-H1000STP-H2000
Flange sizeInlet flangeISO100/6"CFISO160ISO200ISO250/12"CF
Outlet flangeNW25NW40
Pumping speed (l/s)N2 3206001,0002,000
He 2905509001,800
H2 2505008001,600
Compression RatioN2 >108
He 2 x 105
H2 104 105 103
Ultimate Pressure   Pa(Torr)10-10 10-7(10-9) after baking10-9
Maximum Inlet pressure (Torr)Cooled with air/water:-0.50/0.040.13/0.01
Maximum Outlet pressure (Torr)Cooled with air/water:-4/33/3
Rated speed (rpm)48,00035,00027,000
Starting time (min)1067
Vibration µm (O-P)<0.01<0.02
Baking Temp. (°C)<120
Lubricating oil-

What you need, when you need it!


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