Used Shimadzu Turbo Pumps & Controllers
Magnetically Levitated
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Shimadzu Vacuum Precision Instruments. We also offer repair service.
Turbo Controllers
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| Specifications | TMP-1003 | TMP-3403 | |
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| Rotor coating | None | Coated | |
| Cooling method | Water cooled | ||
| Ultimate pressure (after bake out) Pa (Torr) | 10-9 (10-11) | 10-7 (10-9) | |
| Maximum inlet pressure Pa (Torr) | 400Pa (3Torr) | 10Pa (0.3Torr) | |
| Maximum outlet pressure Pa (Torr) | 665Pa (5Torr) | 270Pa (2Torr) | |
| Pumping speed N2 He H2 |
1080L/s 930L/s 790L/s |
3,300L/s 3,100L/s 2,400L/s |
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| Compression ratio N2 He H2 |
109 8 x 104 4 x 103 |
1 x 109 1 x 105 6 x 103 |
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| Rated rotation speed | 35,000 RPM | 22,020 RPM | |
| Startup time | 5 minutes | 15 minutes | |
| Direction of installation | In any direction | ||
| Baking temperature of pump inlet | 120°C or lower | ||
| Vibration, measured by the Shimadzu method | Less than 0.01mm | ||
| Weight | 32kg | 70kg | |
| Recommended purge gas flow rate | 20 - 30 mL/min | ||
| Recommended pumping speed of backing vacuum pump during gas purging | 500 L/min or higher | 1,500 L/min or higher | |
| Operational ambient temperature range | 0 - 40°C | ||
| Allowable magnetic flux density Radial directions Axial directions |
3mT 15mT |
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| Cooling water: Flow rate L/min. Pressure MPa (kgf/cm2) Temperature °C |
1 - 3 0.2 - 0.5 (2 - 5) 5 - 30 |
2 - 4 0.2 - 0.5 (2 - 5) 5 - 25 |
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| Power supply | EI-D1003M | EI-D3403M | |
We can sell pairs: TMP-3403 and EI-3403M; TMP-4203 and EI-4203MZ