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The Varian MacroTorr pump is capable of operating at high foreline pressures because of the high speed to compression ratio. These pumps have silicon nitride, ceramic bearings.
Each turbo pump must match its controller in reference to the same class. For example the Turbo-V 550 pump must match a V550 (stand alone, brick or PCB) controller.
| Turbo-V | 70 | 250 | 300 HT 300 ICE | 550 550 ICE | 1000 HT 1000 ICE |
|---|---|---|---|---|---|
| Speed (l/s) | DN63 | DN 100 | DN 160 | DN 160 | DN 200 |
| Nitrogen | 68 | 250 | 280 | 550 | 950 |
| Helium | 60 | 220 | 230 | 600 | 870 |
| Hydrogen | 45 | 200 | 210 | 510 | 900 |
| Vacuum (mbar) | 1 x 10-9 | 2 x 10-10 | <1 x 10-10 | 1 x 10-10 | |
| Startup (minutes) | <1 | <3 | 5 | <4 | |
| Min. forepump | SD40 | SD300 | SD450 | ||
| Foreline Flange | NW16 | NW25 | NW40 | ||
Alternate flange sizes will affect pumping speeds. Used Varian turbo pumps are sold rebuilt with a 6 month warranty.