Varian Turbo-V 2K-G Turbo Pump
Ask for current price. The Varian Turbo-V 2K-G turbo pump is a dedicated pumping system designed for the Plasma process industry. Its pumping stages and pump structure are optimized to work with very high Ar gas flows and temperatures. The 2K-G is the first pump to fully integrate both purge and vent valves into the pump casing. They are actuated directly by the integrated electronics and nothing hangs out of the pump. They are protected from external shocks and contamination, granting for maximum lifetime.
| Specifications | |
|---|---|
| Pumping speed | N2: 1600 l/s |
| Compression ratio | N2: 3 x 105 |
| Base pressure with recommended forepump | 5 x 10-8 mbar (4 x 10-8 Torr) |
| Inlet flange | ISO 250 F |
| Foreline flange | KF 40 NW |
| Nominal rotational speed | 33,000 rpm |
| Start-up time | <7 minutes |
| Recommended forepump | >40 m 3/h |
| Operating position | Any |
| Operating ambient temperature | +5° C to +40° C |
| Power supply | Input voltage: 100 - 240 Vac, Input freq.: 50 - 60 Hz |
| Communication interface | Analogue I/O: Standard, RS232 / RS485: Standard, Profibus: Optional |
| Dimensions | Height: 335 mm, Diameter: 335 mm |
| Weight | 35 Kg |
Digital Manuals
TV 2K-G instruction manual.