Used Advanced Energy 13.56 MHz Power Supplies

Advanced Energy 13.56 RF Power Supplies
ModelM/NkWattsRepaired
RFDS 2000-2V 2sold
RFG 1250 1.25ask
RFG 1250 HALO 1.25sold
RFG 1251 1.25sold
RFG 2000-2V 2sold
RFG 30003155038-0043$4,000
RFG 3001 3sold
RFG 3002 3sold
RFG 5500 5.5sold

Advanced Energy 13.56 RF Power Supplies
ModelM/NkWattsRepaired
RFX 600 .6ask
RFX 600A3155082-000, 3155082-220.6sold
RFX 1250 1.25$3,500
RFX II 1250 1.25ask
RFX 2500 2.5$3,500
RFX II 3000includeds remote3$4,500
RFX 5500 5.5ask

Advanced Energy 13.56 RF Power Supplies
ModelM/NkWattsRepaired
Apex 1513 1.5$4,500
Apex 3013 3$5,500
Apex 3013 3$5,500
Apex 5513 5$7,500
Apex 10kW/13 10$9,500
Atlas 2012 2ask
Atlas 2060 2$6,500
Cesar 13661300049.6$1,850
Cesar 1330613001223$4,000
HPG-13200 20$15,000
HPG-13300 30ask

These Advanced Energy power supplies are 13.56 MHz sources, sold with a 90 day warranty. Some AE part numbers tell exact configuration like the APEX 1500/13, 3000/13 and 5500/13:


Cesar 1330
SpecificationsCesar 1330
Frequency13.560 MHz +/- 0.005%
Max output power3,000 W into a 50 Ω load
Min output power30 W into a 50 Ω load
Reflected power limit600 W
Delivered power into mismatch20% depending on the load impedance
Load impedance50 Ω
RF connector50 Ω, 7/16 type, female
RF power regulation modeP forward, P delivered, or DC selfbias voltage
Regulation (of set point)1.0 or 0.1% of full-rated power, whichever is greater, into a 50 Ω load
Response time (ms)Consult factory.
Turn off/decay time (ms)Consult factory.
Harmonics-45 dBc at full-rated power
Spurious content-60 dBc max at full-rated power
Pulse modeYes
Pulse repetition frequency 1 to 30 kHzConsult factory.
Pulse duty cycle 1% to 99%Consult factory.
Pulse RF envelope rise / fall time (ms)Consult factory.
CEX operation modeYes
CEX input signal as required0 to +10 dbm
CEX output signal specifications+3 to +10 dbm
CEX connector (50 Ω)BNC, female
DisplayLCD graphic display 256 x 132 dots, black/white


Used Advanced Energy Match Networks

Advanced Energy 13.56 RF Power Supplies
ModelRepaired
3150106ask
3155017-000ask
3155017-003ask
3155026-001ask
3155031-000ask
3155031-020ask
3155031-037ask
3155132-001ask
3155168-002ask
3155162-008$5,800
3155162-041$5,800

Advanced Energy 13.56 RF Power Supplies
ModelRepaired
AMU10E-2ask
ATX-600ask
LM 8000ask
VM 1500 AWask
VM 1500 AW-ECDask
VM 5000 AWask
Navigator 1013-L45Zask
P.5000ask
RFX 1250 Packageask
RFX II 1250 Packageask
RFX II 3000 Packageask

The Advanced Energy E'Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-damascene process flow (DDPF) applications, giving you a competitive edge whether you're electroplating wafers in a production environment or developing new copper processes. The E'Wave power supply offers up to three channels, each of which has an independently driven bipolar power source and is capable of producing, storing and running up to 15 current-controlled or voltage-controlled waveforms.



Used AMAT Match Networks

AMAT Match Networks
AMAT #Repaired
0010-00854ask
0010-09007ask
0010-09416ask
0010-09416Rask
0010-09416Wask
0010-09417ask
0010-09490ask
0010-09750ask
0010-09750Cask
0010-09750Wask
0010-20441ask
0010-20442ask
0010-20524ask
0010-02977ask
0010-30686ask
0010-36162Wask
1110-01063ask


Remote Interface

RFG RFX
ModelRepaired
RFX IIask
RFG-AZXask

The RFG-AZX can be controlled from a variety of attached or remote control panels, an analog/digital connector, or an RFXII-1250 serial data port. The RFXII (Host) interface provides access to all operating parameters and control functions. The analog/digital (User) interface provides data logging capability and access to a number of features.

These RFG-AZX sources are sold with a 90 day warranty. Visit Advanced Energy for specifications.

We also carry used Advanced Energy fluorine traps. We can match Applied Materials (AMAT), and Axcelis power supply configurations for many of these models.



Advanced Energy 13.56 MHz Power Supply Service

We provide repair service for the following models:

Apex 1.5kW

Apex 3kW

Apex 5.5kW

Cesar

RFDS 1250

RFG 1250

RFG 1251

RFG 2000-2V

RFG 3000

RFG 3001

RFG 5500

ATX 600

ATX CP

Mercury 3013

Navigator 1013

Navigator 2013

Navigator 2060

Navigator 2503

Navigator 3013

Navigator 5027

Navigator 5060/5002

Navigator 5513

Navigator 10013

Navigator 30027

HiLight

Call for a quote. 90 day warranty service on Advanced Energy 13.56 MHz power supplies.

"What YOU need, when YOU need it!" 


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