These Advanced Energy power supplies are 13.56 MHz sources, sold with a 90 day warranty. Some AE part numbers tell exact configuration like the APEX 1500/13, 3000/13 and 5500/13:
|Frequency||13.560 MHz +/- 0.005%|
|Max output power||3,000 W into a 50 Ω load|
|Min output power||30 W into a 50 Ω load|
|Reflected power limit||600 W|
|Delivered power into mismatch||20% depending on the load impedance|
|Load impedance||50 Ω|
|RF connector||50 Ω, 7/16 type, female|
|RF power regulation mode||P forward, P delivered, or DC selfbias voltage|
|Regulation (of set point)||1.0 or 0.1% of full-rated power, whichever is greater, into a 50 Ω load|
|Response time (ms)||Consult factory.|
|Turn off/decay time (ms)||Consult factory.|
|Harmonics||-45 dBc at full-rated power|
|Spurious content||-60 dBc max at full-rated power|
|Pulse repetition frequency 1 to 30 kHz||Consult factory.|
|Pulse duty cycle 1% to 99%||Consult factory.|
|Pulse RF envelope rise / fall time (ms)||Consult factory.|
|CEX operation mode||Yes|
|CEX input signal as required||0 to +10 dbm|
|CEX output signal specifications||+3 to +10 dbm|
|CEX connector (50 Ω)||BNC, female|
|Display||LCD graphic display 256 x 132 dots, black/white|
The Advanced Energy E'Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-damascene process flow (DDPF) applications, giving you a competitive edge whether you're electroplating wafers in a production environment or developing new copper processes. The E'Wave power supply offers up to three channels, each of which has an independently driven bipolar power source and is capable of producing, storing and running up to 15 current-controlled or voltage-controlled waveforms.
The RFG-AZX can be controlled from a variety of attached or remote control panels, an analog/digital connector, or an RFXII-1250 serial data port. The RFXII (Host) interface provides access to all operating parameters and control functions. The analog/digital (User) interface provides data logging capability and access to a number of features.
These RFG-AZX sources are sold with a 90 day warranty. Visit Advanced Energy for specifications.
We also carry used Advanced Energy fluorine traps. We can match Applied Materials (AMAT), and Axcelis power supply configurations for many of these models.
We provide repair service for the following models:
Call for a quote. 90 day warranty service on all Advanced Energy 13.56 MHz power supplies.