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Used Advanced Energy 13.56 MHz Power Supplies

Model kWatts Rebuilt Apex 1513 1.5 $4,500 Apex 3013 3 $5,500 Apex 3013 3 $5,500 Apex 5513 5 $7,500 Apex 7kW/13 7 ask Apex 10kW/13 10 ask Atlas 2012 2 ask Atlas 2060 2 $6,500 Cesar 1310 1 ask Cesar 1312 1.2 ask

Model kWatts Rebuilt RFDS 1250-A 1.25 ask RFDS 2000-2V 2 $4,700 RFG 1250 1.25 $3,500 RFG 1250 HALO 1.25 ask RFG 1251 1.25 ask RFG 3000 3 $3,500 RFG 3001 3 ask RFG 3002 3 ask RFG 5500 5.5 $8,500

Model kWatts Rebuilt RFX 600 .6 ask RFX 600A .6 ask RFX 1250 1.25 $3,500 RFX II 1250 1.25 ask RFX 2500 2.5 ask RFX II 3000 3 ask RFX 5500 5.5 ask

These Advanced Energy power supplies are 13.56 MHz sources, sold with a 90 day warranty. Some AE part numbers tell exact configuration like the APEX 1500/13, 3000/13 and 5500/13:

Used Advanced Energy Match Networks

Model Rebuilt 3151801-001 ask 3151802-001 ask 3155031-037 ask 3155132-001 ask 3155168-002 ask 5017-000 ask 5017-003 ask 5026-001 ask 5031-000 ask 5031-020 ask

Model Rebuilt AMU10E-2 ask ATX-600 ask LM 8000 ask Navigator 1013-L45Z ask P.5000 ask RFX 1250 Package ask RFX II 3000 Package ask

The Advanced Energy E'Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-damascene process flow (DDPF) applications, giving you a competitive edge whether you're electroplating wafers in a production environment or developing new copper processes. The E'Wave power supply offers up to three channels, each of which has an independently driven bipolar power source and is capable of producing, storing and running up to 15 current-controlled or voltage-controlled waveforms.

Used AMAT Match Networks

AMAT # Rebuilt 0010-00854 ask 0010-09007 ask 0010-09416 ask 0010-09416R ask 0010-09416W ask 0010-09417 ask 0010-09490 ask 0010-09750 ask 0010-09750C ask 0010-09750W ask 0010-20441 ask 0010-20442 ask 0010-30686 ask 1110-01063 ask

Remote Interface

Model Rebuilt RFG-AZX ask

The RFG-AZX can be controlled from a variety of attached or remote control panels, an analog/digital connector, or an RFXII-1250 serial data port. The RFXII (Host) interface provides access to all operating parameters and control functions. The analog/digital (User) interface provides data logging capability and access to a number of features.

These RFG-AZX sources are sold with a 90 day warranty. Visit Advanced Energy for specifications.

We also carry used Advanced Energy fluorine traps. We can match Applied Materials (AMAT), and Axcelis power supply configurations for many of these models.

Advanced Energy 13.56 MHz Power Supply Service

We provide repair service for the following models:

Apex 1.5kW

• A7L2A000BA140L011A
• A8L2A000BA140L011A
• A3L5L000BA140D111A
• A7L2A000BA140L011A
• A7L2A000BA140L011A
• A8L2A000BA140L011A
• A3L2A000BA140L011A
• A3B2A000BA150A111A
• A3B2B000BA140A011A
• A3B2A000BA150D001D
• A3B2A000BA140L011A

Apex 3kW

• A3D2A000BA140A001A
• A3D2A030BA140A020A
• A3D2B000GA130A111A
• A3D5L000BA140A121A
• A3D2Q000KA130A002D
• A3D2B000GA140A011A
• A3D2M000NA140A011A
• A3D2B030BA140A001A
• A3D5G000HK001U001A
• A3D2A000BA140A011A
• A3D2A000BA140A111A
• A3D2L000BA120R131A
• A3P4A000BA140A011A

Apex 5.5kW

• A3F2L000BA110R011A
• A3F2A000DA130A102D
• A3F2A030BA170A004A
• A3F2B000GA130A111A
• A3J2Q000KA130A002D
• A3F4A000BA110A011A
• A3F4L030BA110A020A
• A3F4B070PA110A010A
• A3F4B060GA110A011A
• A3F4A070GA110A010A
• A3F2B050BA130A011A
• A3F4A060AA110A000A
• A3F4A060GA110A000A
• A3F4B070BA110A010A
• A3F5L000BA120R131A
• Apex 7kW/13
• Apex 10kW/13
• Atlas 2012

RFDS 1250

• 3155059-026
• RFDS 1250-A
• RFDS 2000-2V

RFG 1250

• 3155027-028

RFG 1251

• 3155107-001
• 3155107-005
• 3155107-101
• 3155107-102

RFG 2000-2V

• 3155053-007
• 3175002-001
• 3175002-002

RFG 3000

• 3155038-005

RFG 3001

• 3155089-002
• 3155089-003
• 3155089-004
• 3155089-005
• 3155089-008

RFG 5500

• 3155051-015
• 3155051-115
• RFX 600
• RFX 1250
• RFX II 1250
• RFX 2500
• RFX II 3000
• RFX 5500

ATX 600

• 3155017-000
• 3155017-001
• 3155017-002
• 3155017-012
• 3155017-014
• 3155017-020
• 3155017-037

ATX CP

• 3155021-000
• 3155021-001

Mercury 3013

• 3150274-008

Navigator 1013

• 3155126-009
• 3155126-011
• 3155126-012
• 3155126-018
• 3155126-020
• 3155166-002
• 3155166-003
• 3155166-012

Navigator 2013

• 3155126-026

Navigator 2060

• 3155168-001
• 3155168-002
• 3155168-004

Navigator 2503

• 3155187-001
• 3155187-002
• 3155187-003

Navigator 3013

• 3155132-001
• 3155132-004

Navigator 5027

• 3155126-023

Navigator 5060/5002

• 3155183-001
• 3155183-002

Navigator 5513

• 3155126-024
• 3155144-001
• 3155148-001
• 3155169-001
• 3155169-002
• 3155169-005
• 3155169-006

Navigator 10013

• 3155162-002
• 3155162-003
• 3155162-005
• 3155162-007
• 3155162-012
• 3155162-014
• 3155162-023
• 3155162-024
• 3155162-025
• 3155162-026
• 3155162-027

Navigator 30027

• 3155180-003
• 3155186-001
• 3155186-002

HiLight

• 60100017
• 60100022
• 60100024
• 61300025
• 61300027
• 61300124
• 61300126

Call for a quote. 90 day warranty service on all Advanced Energy 13.56 MHz power supplies.