Used Advanced Energy 13.56 MHz Power Supplies

Advanced Energy 13.56 RF Power Supplies
Model M/N kWatts Repaired
RFDS 2000-2V   2 sold
RFG 1250   1.25 ask
RFG 1250 HALO   1.25 sold
RFG 1251   1.25 sold
RFG 2000-2V   2 sold
RFG 3000 3155038-004 3 $4,000
RFG 3001   3 sold
RFG 3002   3 sold
RFG 5500   5.5 sold

Advanced Energy 13.56 RF Power Supplies
Model M/N kWatts Repaired
RFX 600   .6 ask
RFX 600A 3155082-000, 3155082-220 .6 sold
RFX 1250   1.25 $3,500
RFX II 1250   1.25 ask
RFX 2500   2.5 $3,500
RFX II 3000 includeds remote 3 $4,500
RFX 5500   5.5 ask

Advanced Energy 13.56 RF Power Supplies
Model M/N kWatts Repaired
Apex 1513   1.5 $4,500
Apex 3013   3 $5,500
Apex 3013   3 $5,500
Apex 5513   5 $7,500
Apex 10kW/13   10 $9,500
Atlas 2012   2 ask
Atlas 2060   2 $6,500
Cesar 136 61300049 .6 $1,850
Cesar 1330 61300122 3 $4,000
HPG-13200   20 $15,000
HPG-13300   30 ask

These Advanced Energy sources will be repaired, tested and backed by a 90 day warranty. Some AE part numbers tell exact configuration like the APEX 1500/13, 3000/13 and 5500/13:


Cesar 1330
Specifications Cesar 1330
Frequency 13.560 MHz +/- 0.005%
Max output power 3,000 W into a 50 Ω load
Min output power 30 W into a 50 Ω load
Reflected power limit 600 W
Delivered power into mismatch 20% depending on the load impedance
Load impedance 50 Ω
RF connector 50 Ω, 7/16 type, female
RF power regulation mode P forward, P delivered, or DC selfbias voltage
Regulation (of set point) 1.0 or 0.1% of full-rated power, whichever is greater, into a 50 Ω load
Response time (ms) Consult factory.
Turn off/decay time (ms) Consult factory.
Harmonics -45 dBc at full-rated power
Spurious content -60 dBc max at full-rated power
Pulse mode Yes
Pulse repetition frequency 1 to 30 kHz Consult factory.
Pulse duty cycle 1% to 99% Consult factory.
Pulse RF envelope rise / fall time (ms) Consult factory.
CEX operation mode Yes
CEX input signal as required 0 to +10 dbm
CEX output signal specifications +3 to +10 dbm
CEX connector (50 Ω) BNC, female
Display LCD graphic display 256 x 132 dots, black/white


Used Advanced Energy Match Networks

Advanced Energy 13.56 RF Power Supplies
Model Repaired
3150106 ask
3155017-000 ask
3155017-003 ask
3155026-001 ask
3155031-000 ask
3155031-020 ask
3155031-037 ask
3155132-001 ask
3155168-002 ask
3155162-008 $5,800
3155162-041 $5,800

Advanced Energy 13.56 RF Power Supplies
Model Repaired
AMU10E-2 ask
ATX-600 ask
LM 8000 ask
VM 1500 AW ask
VM 1500 AW-ECD ask
VM 5000 AW ask
Navigator 1013-L45Z ask
P.5000 ask
RFX 1250 Package ask
RFX II 1250 Package ask
RFX II 3000 Package ask

The Advanced Energy E'Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-damascene process flow (DDPF) applications, giving you a competitive edge whether you're electroplating wafers in a production environment or developing new copper processes. The E'Wave power supply offers up to three channels, each of which has an independently driven bipolar power source and is capable of producing, storing and running up to 15 current-controlled or voltage-controlled waveforms.



Used AMAT Match Networks

AMAT Match Networks
AMAT # Repaired
0010-00854 ask
0010-09007 ask
0010-09416 ask
0010-09416R ask
0010-09416W ask
0010-09417 ask
0010-09490 ask
0010-09750 ask
0010-09750C ask
0010-09750W ask
0010-20441 ask
0010-20442 ask
0010-20524 ask
0010-02977 ask
0010-30686 ask
0010-36162W ask
1110-01063 ask


Remote Interface

RFG RFX
Model Repaired
RFX II ask
RFG-AZX ask

The RFG-AZX can be controlled from a variety of attached or remote control panels, an analog/digital connector, or an RFXII-1250 serial data port. The RFXII (Host) interface provides access to all operating parameters and control functions. The analog/digital (User) interface provides data logging capability and access to a number of features.

These RFG-AZX sources are sold with a 90 day warranty. Visit Advanced Energy for specifications.

We also carry used Advanced Energy fluorine traps. We can match Applied Materials (AMAT), and Axcelis power supply configurations for many of these models.



Advanced Energy 13.56 MHz Power Supply Service

We provide repair and testing service for the following models:

Apex 1.5kW

Apex 3kW

Apex 5.5kW

Cesar

RFDS 1250

RFG 1250

RFG 1251

RFG 2000-2V

RFG 3000

RFG 3001

RFG 5500

ATX 600

ATX CP

Mercury 3013

Navigator 1013

Navigator 2013

Navigator 2060

Navigator 2503

Navigator 3013

Navigator 5027

Navigator 5060/5002

Navigator 5513

Navigator 10013

Navigator 30027

HiLight

Contact us for a quote: 90 day warranty repair service and testing on these Advanced Energy RF power supplies.

"What YOU need, when YOU need it!" 


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