Used Advanced Energy Power Supplies

Model kWatts Tested Apex 1513 1.5 $3,500 Apex 3013 3 $4,500 Apex 3013 3 $4,500 Apex 5513 5 $6,500 Apex 7kW/13 7 $4,500 Apex 10kW/13 10 $5,500 Atlas 2012 2 $5,000

Model kWatts Tested RFDS 1250-A 1.25 $4,500 RFDS 2000-2V 2 $4,200 RFG 1250 1.25 $3,500 RFG 1250 HALO 1.25 ask RFG 1251 1.25 ask RFG 3000 3 $4,200 RFG 3001 3 ask RFX 600 .6 ask RFX 1250 1.25 $3,500 RFX II 1250 1.25 $4,500 RFX 2500 2.5 ask RFX II 3000 3 ask RFX 5500 5.5 $8,500

These Advanced Energy power supplies are 13.56 MHz sources, sold with a 90 day warranty. Some AE part numbers tell exact configuration like the APEX 1500/13, 3000/13 and 5500/13:

Used Advanced Energy Match Networks

Model Control AMU10E-2 - P.5000 - ATX-600 - 3151802-001 - 5017-000 - 5017-003 - 5026-001 - 5031-000 - 5031-020 - LM 8000 -

The Advanced Energy E'Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-damascene process flow (DDPF) applications, giving you a competitive edge whether you're electroplating wafers in a production environment or developing new copper processes. The E'Wave power supply offers up to three channels, each of which has an independently driven bipolar power source and is capable of producing, storing and running up to 15 current-controlled or voltage-controlled waveforms.

Remote Interface

Model Tested RFG-AZX ask

The RFG-AZX can be controlled from a variety of attached or remote control panels, an analog/digital connector, or an RFXII-1250 serial data port. The RFXII (Host) interface provides access to all operating parameters and control functions. The analog/digital (User) interface provides data logging capability and access to a number of features.

These RFG-AZX sources are sold with a 90 day warranty. Visit Advanced Energy for specifications.

We also carry used Advanced Energy fluorine traps. We can match Applied Materials (AMAT), and Axcelis power supply configurations for many of these models.