AE Magnetron MDX-20K Low Z Master Novellus

Model 2223-024

Special Novellus low-z software has been added. Unit can be turned on from front panel, but level can't be changed. Host port allows user to configure two different power setpoints (idle power and process power) and three different ramp times (ramp rate A, B and C).

When On command is issued, unit ramps up (at ramp rate A) to idle power level and remains there until the process command is given over the Host port.

This software will give you problems. The front panel will let you turn it on, but you will not be able to turn the level up from there. This unit is designed to be run from the host port. There are special command codes that will control it.

Electrical Input

• Line: 208V +/-10%, 3 phase, 5 wire, 50/60 Hz, 40A

20 kW Low Z, one of three taps

• 500V @ 25A, 16 Ohm load
• 640V @ 20A, 25 Ohm load
• 800V @ 15.5A, 41.6 Ohm load

Standard Features

• 1550V open circuit
• Host computer control via RS232 Interface
• Remote control (analog inputs)
• Kilowatt hour counter (up to 8 targets)
• Run time counter
• Run time timer
• Out of setpoint timer
• Key controlled mode switch (lockable off position)
• UHF connector provided (PL259)
• Voltage, Current and Power metering on front panel
• Interconnect cable provided for signals only
• Weight: 65 lbs