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Each MDX is equipped with a built in impedance matching transformer. These tap-selectable transformers are available in high Z, standard Z or low Z configurations. With the proper transformer and tap, load impedances requiring voltages from 400 V to 1,250 V can be accommodated.
The MDX can be used as a power, current or voltage source, depending on the method of output regulation selected. Since setpoint levels are stored in nonvolatile memory, they can be used in recovering from input power interruptions and to ensure repeatability from run to run.
The MDXL is DC magnetron source by rectifying a switching frequency of 17 - 31 kHz.
| Model | Input | Output | kW | Weight |
|---|---|---|---|---|
| MDX-L6 | 25A | 525V 15A | 6 | 51 |
| MDX-L12 | 50A | 525V 30A | 12 | 55 |
| MDX-L12M-650 | 50A | 650V 24A | 12 | 55 |
| MDX-L18 | 75A | 600V 45A | 18 | 74 |
The Sparc-le integrates into existing systems with both old and new MDX products.
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The Advanced Energy E'Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-damascene process flow (DDPF) applications, giving you a competitive edge whether you're electroplating wafers in a production environment or developing new copper processes. The E'Wave power supply offers up to three channels, each of which has an independently driven bipolar power source and is capable of producing, storing, and running up to 15 current-controlled or voltage-controlled waveforms.
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The MDX can be controlled from a variety of attached or remote control panels, an analog/digital connector, or an RS-232 serial data port. The RS-232 (Host) interface provides access to all operating parameters and control functions. The analog/digital (User) interface provides data logging capability and access to a number of features.
These DC magnetron sources are sold with a 90 day warranty. Visit Advanced Energy for specifications. Contact us for details on our MDX-5K, MDX-10K and MDX-20K.
We also carry used Advanced Energy fluorine traps.
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We provide repair service for most of the following models:
MDX-500
MDX-1K
MDX-1.5K
MDX-2.5K
MDX-5K
MDX-10K
MDX-20K
MDX-25K
MDX-30K
MDX-40K
MDX-50K
MDX-60K
MDX-L 6K
MDX-L 12K
MDX-L 18K
MDX-L 15K
MDL-II 10K
MDL-II 15K
MDX-II 30K
Sparc VS
Sparc II
Sparc-le 20
Sparc-le HR
Sparc-le II
Sparc-le V
Call for a quote. 90 day warranty service on most Advanced Energy DC magnetron power supplies. Our repair price for the MDX-10 will not excede $2,400.