Used Advanced Energy MDX DC Magnetron

Model	Rebuilt
MDX-1K	$3,000
MDX-1.5K	$4,000
MDX-5K	$4,000
MDX-10K	$4,500
MDX-20K	$6,500
MDX-30K	$8,500
MDX-II 15K	$10,000
MDX-II 30K	ask
MDX-II 30K	$16,000

Model	Rebuilt
MDX-L6	ask
MDX-L12	ask
MDX-L12-650	ask
MDX-L12M	ask
MDX-L12M-650	ask
MDX-L18M	ask
Pinnacle	see link

Output Impedance Range

Each MDX is equipped with a built in impedance matching transformer. These tap-selectable transformers are available in high Z, standard Z or low Z configurations. With the proper transformer and tap, load impedances requiring voltages from 400 V to 1,250 V can be accommodated.

Output Regulation

The MDX can be used as a power, current or voltage source, depending on the method of output regulation selected. Since setpoint levels are stored in nonvolatile memory, they can be used in recovering from input power interruptions and to ensure repeatability from run to run.

The MDXL is DC magnetron source by rectifying a switching frequency of 17 - 31 kHz.

Model	Input	Output	kW	Weight
MDX-L6	25A	525V 15A	6	51
MDX-L12	50A	525V 30A	12	55
MDX-L12M-650	50A	650V 24A	12	55
MDX-L18	75A	600V 45A	18	74

The Sparc-le integrates into existing systems with both old and new MDX products.

E'Wave

Model	Rebuilt
E'Wave	ask

The Advanced Energy E'Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-damascene process flow (DDPF) applications, giving you a competitive edge whether you're electroplating wafers in a production environment or developing new copper processes. The E'Wave power supply offers up to three channels, each of which has an independently driven bipolar power source and is capable of producing, storing, and running up to 15 current-controlled or voltage-controlled waveforms.

Remote Interface

Model	Rebuilt
MDX-052	ask
MDX-L	$500

The MDX can be controlled from a variety of attached or remote control panels, an analog/digital connector, or an RS-232 serial data port. The RS-232 (Host) interface provides access to all operating parameters and control functions. The analog/digital (User) interface provides data logging capability and access to a number of features.

These DC magnetron sources are sold with a 90 day warranty. Visit Advanced Energy for specifications. Contact us for details on our MDX-5K, MDX-10K and MDX-20K.

We also carry used Advanced Energy fluorine traps.

Magnetron Source

Source	Target	Q
Mitsui MU570S	Ta	335.3 x 6.35

Advanced Energy DC Magnetron Service

We provide repair service for most of the following models:

MDX-500

3152261-000
3152261-001
3152261-002
3152261-004
3152261-006
3152261-007
3152296-004
3152342-000
3152342-001
3152342-002
3152342-005
3152342-006
3152342-012
3152342-013
3152361-001
3152361-002
3152361-003
3152384-000

MDX-1K

3152105-000
3152105-004
3152105-006
3152105-009
3152105-014
3152105-015
3152105-016
3152105-017
3152164-000
3152164-004
3152164-005
3152164-014
3152164-015
3152164-016
3152164-022
3152239-003

MDX-1.5K

3152240-002
3152240-003
3152240-004
3152240-007
3152240-008
3152282-000

MDX-2.5K

3152224-000
3152224-009
3152224-010
3152224-013
3152224-014
3152224-016
3152224-021
3152224-023
3152224-031

MDX-5K

3152194-016
3152194-022
3152011-000
3152011-008
3152011-016
3152011-054
3152011-056
3152011-064
3152011-067
3152011-070
3152011-071
3152011-072
3152011-073
3152011-077
3152011-078
3152011-092

MDX-10K

3152194-004
3152194-008
3152012-000
3152012-025
3152012-041
3152012-043
3152012-090
3152012-095
3152012-096
3152012-097
3152012-102
3152012-103
3152012-106
3152012-107
3152012-112
3152012-129
3152012-130
3152012-137
3152012-157
3152012-162

MDX-20K

3152194-005
3152194-013
3152223-003
3152223-033
3152223-034
3152223-039
3152223-041

MDX-25K

3152235-004

MDX-30K

3152232-007
3152232-011

MDX-40K

3152236-004

MDX-50K

3152318-002
3152318-003

MDX-60K

3152308-002

MDX-L 6K

3152343-000
3152343-101
3152344-104

MDX-L 12K

3152344-200
3152344-201
3152410-100

MDX-L 18K

3152345-100

MDX-L 15K

3152345-102

MDL-II 10K

3152354-003

MDL-II 15K

3152354-004
3152254-210
3152256-007
3152256-200
3152256-202
3152256-215
3152256-221

MDX-II 30K

3152255-012
3152255-213
3152255-215
3152258-004
3152258-203
3152258-206
3152258-208
3152258-213
3152258-221
3152258-225

Sparc VS

3151501-002

Sparc II

3152013-000
3152013-001
3152013-002

Sparc-le 20

3152244-000
3152244-001
3152244-009
3152244-020
3152244-024
3152244-026

Sparc-le HR

3152244-025
3152244-101

Sparc-le II

3152295-004

Sparc-le V

3152330-003
3152330-009
3152330-103
3152330-104
3152330-204

Call for a quote. 90 day warranty service on most Advanced Energy DC magnetron power supplies. Our repair price for the MDX-10 will not excede $2,400.