Used Advanced Energy MDX DC Magnetron

Model Tested MDX-1K $2,500 MDX-5K ask MDX-10K $4,000 MDX-20K $5,000 MDX-30K $6,000 MDX-II 15K $8,500 MDX-II 30K $11,500 Pinnacle prices MDX-L6 $2,100 MDX-L12 ask MDX-L12M $6,500 MDX-L12M-650 ask

Output Impedance Range

Each MDX is equipped with a built in impedance matching transformer. These tap-selectable transformers are available in high Z, standard Z or low Z configurations. With the proper transformer and tap, load impedances requiring voltages from 400 V to 1250 V can be accommodated.

Output Regulation

The MDX can be used as a power, current or voltage source, depending on the method of output regulation selected. Since setpoint levels are stored in nonvolatile memory, they can be used in recovering from input power interruptions and to ensure repeatability from run to run.

The MDXL is DC magnetron source by rectifying a switching frequency of 17 - 31 kHz.

DC Pulsing ARC Handling

Model Tested Sparc-le 20 ask Sparc-le V ask

The Sparc-le 20 3152244-024 clears arcs in 5ms and dramatically reduces the number of hard arcs, resulting in reduced particulates and increased process time. Its small size allows for easy integration into existing systems with both old and new MDX products.

E'Wave

Model Tested E'Wave ask

The Advanced Energy E'Wave bipolar pulsed DC power supply improves surface uniformity and reduces additive consumption for the copper-plating phase of dual-damascene process flow (DDPF) applications, giving you a competitive edge whether you're electroplating wafers in a production environment or developing new copper processes. The E'Wave power supply offers up to three channels, each of which has an independently driven bipolar power source and is capable of producing, storing, and running up to 15 current-controlled or voltage-controlled waveforms.

Remote Interface

Model Tested MDX-052 $1,650 MDX-L $500

The MDX can be controlled from a variety of attached or remote control panels, an analog/digital connector, or an RS-232 serial data port. The RS-232 (Host) interface provides access to all operating parameters and control functions. The analog/digital (User) interface provides data logging capability and access to a number of features.

These DC magnetron sources are sold with a 90 day warranty. Visit Advanced Energy for specifications. Contact us for details on our MDX-5K, MDX-10K and MDX-20K.

We also carry used Advanced Energy fluorine traps.

Magnetron Source

Source Target Q Mitsui MU570S Ta 335.3 x 6.35