MKS ENI 13.56 & 12.56 MHz Power Supplies
 | | Model # | Part # | Customer Part # | kWatts | Rebuilt |
|---|
| B-3013 | Spectrum 3013-08 | 1001354DF | 3 | $6,500 | | B-10513 | Spectrum 10513-00 | 0190-17877 | 10.5 | ask |
|
 | | Model # | Part # | Customer Part # | Rebuilt |
|---|
| GHW-12A | GHW12A-13DF2N0-001 | 0190-06990 | $3,500 | | GHW-12Z | GHW12Z-13DF2N0-001 | 0190-06988 | $3,500 | | GHW-12Z | GHW12Z-13DF2N0-001 | 0190-06988 | $3,500 | | GHW-12Z | GHW12Z-13DF2N0-001 | 0190-06988 | $3,500 | | GHW-12Z | GHW12Z-13DF2N0-001 | 0190-06988 | $3,500 | | GHW-12Z | GHW12Z-13DF2N0-001 | 0190-06988 | $3,500 | | GHW-12Z | GHW12Z-13DF2N0-001 | 0190-06988 | $3,500 | | GHW-12Z | GHW12Z-13DF2NH-001 | 0190-25529 | $3,500 | | GHW-12Z | GHW12Z-13DF2N0-001 | 0190-09832 | $3,500 | | GHW-25A | GHW25A-13DF3N0-000 | | ask | | GHW-25A | GHW25A-13DF3N0-000 | | ask | | GHW-50A | GHW50A-12DF3H0-M1 | 0920-01098W | $9,500 | | GHW-50A | GHW50A-12DF3H0-M1 | 0920-01098 | $9,500 | | GHW-50A | GHW50A-12DF3H0-M1 | 0920-01098 | $9,500 | | GHW-50A | S-02-042 | 0190-07492 | $9,500 | | GHW-50A | S-02-042 | 0190-07492 | $9,500 | | GHW-55A | GHW55A-13DF4L0-001 | | ask | | GHW-55A | GHW55A-13DF4L0-001 | | ask | | GHW-85A | GHW80A-13DF2L0-001 | 27-105447-00 | $11,500 | | GHW-85A | GHW80A-13DF2L0-001 | 27-105447-00 | $11,500 | | GHW-85A | GHW80A-13DF2L0-001 | R27-274812-00 | $11,500 |
|
Notice the interface difference between the MKS ENI OEM-12A and the OEM-12B power supplies.
ACG
ENI Matching Networks & Controllers
Used Astex Match Networks
MKS ENI Matchwork Impedance Matching Networks provide tuning from 40W to 10kW and 2MHz to 40.68Mhz.
| Power Supply | 6 | 12 | 25 | 50 | 1250 | 2000 |
|---|
| Output (kW) | .600 | 1.25 | 2.50 | 5.00 | 1.25 | 2.0 |
| Power Regulation | 1% into 50 Ohms |
| Frequency Stability | 13.56 MHz ±.05% |
| Max Output (kW) | 750 | 1,250 | 2,730 | 5,000 | 1,250 | 2,000 |
| Harmonic Dist. | -55 dBc | -45 dBc | -55 dBc |
| Noise, Ripple | -30 dBc at full power |
| Line Voltage | 198-240 VAC, 1Φ, 50/60Hz |
| Connectors | Type N | HN | LC | N | HN |
| Net Weight (lbs.) | 76 | 126 | 225 | 375 | 48.5 | 77.2 |
| Water Flow (gpm) | 0.8 | 1.2 | 2.0 | 4 | 1.2 | 1.8 |
| HxWxD (inches) | 7x17x15 | 9x17x16 | 18x17x21 | 27x17x21 | 7x17x13 | 7x17x24 |
The OEM-50 models we have are: OEM-50M2 (25 pin), OEM-50N11601 (15 pin), OEM-50-01M6 (15 pin).
MKS ENI 13.56 MHz Power Supply Service
We provide repair service for the following models:
- OEM-6
- OEM-6A
- OEM-6B
- OEM-650A
- OEM-650A XL
- OEM-12
- OEM-12A
- OEM-12A XL
- OEM-12B
- OEM-12B-02
- OEM-12B-07
- OEM-12B3
- OEM-12B3-02
- OEM-1250
- OEM-25A
- OEM-25N-11481
- OEM-25N-XL
- OEM-28B
- OEM-50
- Spectrum 3kW
- Spectrum 5kW
- Spectrum 10.5kW
- Spectrum 11kW
- ACG-3
- ACG-5
- ACG-6
- ACG-10
- ACG-10B
Call for a quote. 90 day warranty service on all MKS ENI 13.56 MHz power supplies.
