MKS ENI 13.56 & 12.56 MHz Power Supplies

GMW 25Z
Model # Part # Customer Part # Rebuilt
GHW-12A GHW12A-13DF2N0-001 0190-06990 $3,500
GHW-12Z GHW12Z-13DF2N0-001 0190-06988 $3,500
GHW-12Z GHW12Z-13DF2N0-001 0190-06988 $3,500
GHW-12Z GHW12Z-13DF2N0-001 0190-06988 $3,500
GHW-12Z GHW12Z-13DF2N0-001 0190-06988 $3,500
GHW-12Z GHW12Z-13DF2N0-001 0190-06988 $3,500
GHW-12Z GHW12Z-13DF2N0-001 0190-06988 $3,500
GHW-12Z GHW12Z-13DF2NH-001 0190-25529 $3,500
GHW-12Z GHW12Z-13DF2N0-001 0190-09832 $3,500
GHW-25A GHW25A-13DF3N0-000   ask
GHW-25A GHW25A-13DF3N0-000   ask
GHW-50A GHW50A-12DF3H0-M1 0920-01098W ask
GHW-55A GHW55A-13DF4L0-001   ask
GHW-85A GHW80A-13DF2L0-001 27-105447-00 ask
GHW-85A GHW80A-13DF2L0-001 27-105447-00 ask
GHW-85A GHW80A-13DF2L0-001 R27-274812-00 ask

Notice the interface difference between the MKS ENI OEM-12A and the OEM-12B power supplies.

13.56
Model kWatts Rebuilt
OEM-6A .650 $1,800
OEM-6B .650 ask
OEM-650A .650 $2,200
OEM-650A XL .650 $2,300
OEM-12 1.250 ask
OEM-12A 1.250 ask
OEM-12A XL 1.250 $3,500

13.56
Model kWatts Rebuilt
OEM-12B 1.250 $4,200
OEM-12B3 1.250 $4,200
OEM-1250 1.250 ask
OEM-2000 2.000 ask
OEM-25A 2.500 $4,500
OEM-25B 2.500 ask
OEM-25N-11481 2.500 ask
OEM-25N-XL 2.500 ask
OEM-28B 2.750 ask
OEM-50 5.000 ask
13.56
Model # Part # Customer Part # kWatts Rebuilt
B-3013 Spectrum 3013-08 1001354DF 3 $6,500
B-10513 Spectrum 10513-00 0190-17877 10.5 ask

ACG

ACG
Model kWatts Rebuilt
ACG-3 .300 ask
ACG-3B .300 $3,600
ACG-5 .500 ask
ACG-6 .600 ask
ACG-6B .660 ask
ACG-10 1.00 ask
ACG-10B 1.00 $4,400


ENI Matching Networks & Controllers

matchnetworks
Model Control
MW-5D-01M5  
MWD-25LD-06M3 RFC-6-01
MWD-25LD-06 RFC-6-01
MWM-25-02X  
MWD-55LD-01  

Used Astex Match Networks

astex
Model Rebuilt
EX1 ask
APX-X491 ask

MKS ENI Matchwork Impedance Matching Networks provide tuning from 40W to 10kW and 2MHz to 40.68Mhz.

Power Supply 6 12 25 50 1250 2000
Output (kW) .600 1.25 2.50 5.00 1.25 2.0
Power Regulation 1% into 50 Ohms
Frequency Stability 13.56 MHz ±.05%
Max Output (kW) 750 1,250 2,730 5,000 1,250 2,000
Harmonic Dist. -55 dBc -45 dBc -55 dBc
Noise, Ripple -30 dBc at full power
Line Voltage 198-240 VAC, 1Φ, 50/60Hz
Connectors Type N HN LC N HN
Net Weight (lbs.) 76 126 225 375 48.5 77.2
Water Flow (gpm) 0.8 1.2 2.0 4 1.2 1.8
HxWxD (inches) 7x17x15 9x17x16 18x17x21 27x17x21 7x17x13 7x17x24

The OEM-50 models we have are: OEM-50M2 (25 pin), OEM-50N11601 (15 pin), OEM-50-01M6 (15 pin).



MKS ENI 13.56 MHz Power Supply Service

We provide repair service for the following models:

Call for a quote. 90 day warranty service on all MKS ENI 13.56 MHz power supplies.

"What YOU need, when YOU need it!" 


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