Used ENI RF Power Supplies

Model kHz kWatts Rebuilt DPGS-10 250* 1.25 $5,500 DPGD-10 250* 1.25 $5,500 HF-300 - .300 $1,300 HF-650 - .650 $1,800 LPG-6A 90-460 .600 $1,700 LPG-12A 90-460 1.2 $2,500 Nova-50 - - ask PL1-HF 90-460 .750 ask PL2-HF 90-460 2 ask PL3-HF 90-460 3 ask Quanta-10 350 .900x2 $3,500 Spectrum - 10.5 ask

All sources will be rebuilt and tested with a 90 day warranty.

The DPG is a dual output generator for RF and also * up to 500V DC.

PL 1-HF & 2-HF

• Frequency range: 90 - 460 kHz
• RF output impedance: 50 - 600 ohms
• Power leveling: forward or load (plasma)
• AC power line: 115 VAC ±8%, 20 A, 50-60 Hz
• Plasma matching: built-in variable 7-position step transformer for plasma impedances between 50 and 600 ohms.
• Mismatch protection: up to 200W before shutdown
• Control interface: type D, 9-pin connector
• RF output connector: Type C
• Size: 8.75" H x 17" W x 20.3"
• Weight: 46 lbs
• The ENI Plasmaloc HF2 software version is 1.21