Used HPS - MKS Angle Valves
Series VacuComp valves are stainless steel and have been designed for long life in high cycle applications. Their inherent simplicity and excellent design have allowed them to be used in semiconductor production systems with chemical and particulate contamination as well as highly sophisticated research applications in plasma physics and nuclear accelerators.
MKS angle valves. Operation and Manual for MKS 145 Series
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